IP Library › Patent Application 60391931
Patent Application Provisional
App. No. 60/391,931 · Confirmation No. 6876

System and method for automated focus measuring of a lithography tool

Provisional Application Expired
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 Code Description Pages PDF
2002-06-28 TRNA Transmittal of New Application 4 View
2002-06-28 ADS Application Data Sheet 1 View
2002-06-28 SPEC Specification 12 View
2002-06-28 CLM Claims 5 View
2002-06-28 ABST Abstract 1 View
2002-06-28 DRW Drawings-only black and white line drawings 13 View
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Quick Facts
App. No.
60/391,931
Filed
2002-06-28