Patent Application
Provisional
Small
App. No. 60/401,948
· Confirmation No. 4022
Alkaline metal-free solution for electroless deposition of Co(W,P) barrier/capping layer for interconnect applications
Provisional Application Expired
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 26541
- Docket No.
- 22002000200
- Confirmation No.
- 4022
TERMINATION AND RELEASE OF INTELLECTUAL PROPERTY SECURITY
Recorded 2004-10-08
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Quick Facts
- App. No.
- 60/401,948
- Filed
- 2002-08-08
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