Patent Assignment
Reel/Frame 014422/0096
Security Interest
Recorded: 2004-03-12
Pages: 12
Assignor
BLUE29 CORPORATION
Executed: 2004-03-01
Assignee
KT VENTURE GROUP LLC
160 RIO ROBLES, SAN JOSE, CALIFORNIA, 95134-1809
Covered Properties
(10)
Apparatus and Method for Electroless Deposition of Materials on Semiconductor Substrates
Method and Apparatus for Electroless Deposition with Temperature-Controlled Chuck
Temperature-Controlled Substrate Holder for Processing in Fluids
Spatially-Arranged Chemical Processing Station
Method of electroless deposition of thin metal and dielectric films with temperature controlled stages of film growth
Methods and System for Processing a Microelectronic Topography
Microelectronic Fabrication System Components and Method for Processing a Wafer Using Such Components
Method for Strengthening Adhesion Between Dielectric Layers Formed Adjacent to Metal Layers
Multi-staged heating system for fabricating microelectronic devices
Application:
10/624,397 →
Publication:
US 2005/0016201
Alkaline metal-free solution for electroless deposition of Co(W,P) barrier/capping layer for interconnect applications
Application:
60/401,948 →
Related Assignments
(9)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 16, 2003
From: IVANOV, IGOR C.; ZHANG, WEIGUO; KOLICS, ARTUR
To: BLUE29 CORPORATION
Reel/Frame 014189/0065 →
Assignment of Assignor's Interest
Jun 16, 2003
From: IVANOV, IGOR C.; ZHANG, WEIGUO
To: BLUE29 CORPORATION
Reel/Frame 014190/0498 →
Assignment of Assignor's Interest
Jun 16, 2003
From: IVANOV, IGOR C.; ZHANG, WEIGUO
To: BLUE29 CORPORATION
Reel/Frame 014193/0039 →
Security Interest
Dec 19, 2003
From: BLUE29 CORPORATION
To: KT VENTURE GROUP, L.L.C.
Reel/Frame 014209/0180 →
Security Interest
Mar 4, 2004
From: BLUE29 CORPORATION
To: KT VENTURE GROUP, L.L.C.
Reel/Frame 014447/0532 →
Assignment of Assignor's Interest
Jul 1, 2004
From: IVANOV, IGOR; ZHANG, JONATHAN (WEIGUO); KOLICS, ARTUR
To: BLUE29 CORPORATION
Reel/Frame 014806/0621 →
Security Agreement
Jul 14, 2004
From: BLUE29 CORPORATION
To: KT VENTURE GROUP, L.L.C.
Reel/Frame 014851/0494 →
Security Agreement
Oct 2, 2006
From: BLUE 29, LLC
To: KLA-TENCOR CORPORATION
Reel/Frame 018323/0734 →
Assignment of Assignor's Interest
Oct 1, 2007
From: BLUE29, L.L.C.
To: LAM RESEARCH CORPORATION
Reel/Frame 019899/0690 →