Patent Assignment
Reel/Frame 014209/0180
Security Interest
Recorded: 2003-12-19
Pages: 12
Assignor
BLUE29 CORPORATION
Executed: 2003-12-17
Assignee
KT VENTURE GROUP, L.L.C.
160 RIO ROBLES, SAN JOSE, CALIFORNIA, 95134
Covered Properties
(10)
Apparatus and Method for Electroless Deposition of Materials on Semiconductor Substrates
Method and Apparatus for Electroless Deposition with Temperature-Controlled Chuck
Temperature-Controlled Substrate Holder for Processing in Fluids
Spatially-Arranged Chemical Processing Station
Method of electroless deposition of thin metal and dielectric films with temperature controlled stages of film growth
Methods and System for Processing a Microelectronic Topography
Microelectronic Fabrication System Components and Method for Processing a Wafer Using Such Components
Method for Strengthening Adhesion Between Dielectric Layers Formed Adjacent to Metal Layers
Multi-staged heating system for fabricating microelectronic devices
Application:
10/624,397 →
Publication:
US 2005/0016201
Alkaline metal-free solution for electroless deposition of Co(W,P) barrier/capping layer for interconnect applications
Application:
60/401,948 →
Related Assignments
(9)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 16, 2003
From: IVANOV, IGOR C.; ZHANG, WEIGUO; KOLICS, ARTUR
To: BLUE29 CORPORATION
Reel/Frame 014189/0065 →
Assignment of Assignor's Interest
Jun 16, 2003
From: IVANOV, IGOR C.; ZHANG, WEIGUO
To: BLUE29 CORPORATION
Reel/Frame 014190/0498 →
Assignment of Assignor's Interest
Jun 16, 2003
From: IVANOV, IGOR C.; ZHANG, WEIGUO
To: BLUE29 CORPORATION
Reel/Frame 014193/0039 →
Security Interest
Mar 4, 2004
From: BLUE29 CORPORATION
To: KT VENTURE GROUP, L.L.C.
Reel/Frame 014447/0532 →
Security Interest
Mar 12, 2004
From: BLUE29 CORPORATION
To: KT VENTURE GROUP LLC
Reel/Frame 014422/0096 →
Assignment of Assignor's Interest
Jul 1, 2004
From: IVANOV, IGOR; ZHANG, JONATHAN (WEIGUO); KOLICS, ARTUR
To: BLUE29 CORPORATION
Reel/Frame 014806/0621 →
Security Agreement
Jul 14, 2004
From: BLUE29 CORPORATION
To: KT VENTURE GROUP, L.L.C.
Reel/Frame 014851/0494 →
Security Agreement
Oct 2, 2006
From: BLUE 29, LLC
To: KLA-TENCOR CORPORATION
Reel/Frame 018323/0734 →
Assignment of Assignor's Interest
Oct 1, 2007
From: BLUE29, L.L.C.
To: LAM RESEARCH CORPORATION
Reel/Frame 019899/0690 →