IP Library › Patent Application 62114521
Patent Application Provisional
App. No. 62/114,521 · Confirmation No. 9420

System and Method for Characterization and Process Control of Structures on Semiconductor Wafers during Manufacturing using Secondary Ion Mass Spectrometry

Provisional Application Expired
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 Code Description Pages PDF
2015-03-13 APP.FILE.REC Filing Receipt 3 View
2015-03-12 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2015-03-12 ADS Application Data Sheet 7 View
2015-03-12 WFEE Fee Worksheet (SB06) 2 View
2015-03-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-02-26 NTC.MISS.PRT Notice to File Missing Parts 2 View
2015-02-26 APP.FILE.REC Filing Receipt 3 View
2015-02-10 ADS Application Data Sheet 7 View
2015-02-10 SPEC Specification 27 View
2015-02-10 CLM Claims 3 View
2015-02-10 ABST Abstract 1 View
2015-02-10 DRW Drawings-only black and white line drawings 19 View
2015-02-10 WFEE Fee Worksheet (SB06) 2 View
2015-02-10 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
62/114,521
Filed
2015-02-10