Semiconductor device and fabrication process therefor
A semiconductor device which includes: a semiconductor chip bonded to a surface of a solid device; and a stiffener surrounding the periphery of the semiconductor chip. A surface of the stiffener opposite from the solid device is generally flush with a surface of the semiconductor chip opposite from the solid device.
1. A fabrication process for a semiconductor device, comprising the steps of:
bonding a semiconductor chip to a surface of a solid device with an active surface of the semiconductor chip being opposed to the solid device;
providing a synthetic resin material to surround the periphery of the semiconductor chip with the synthetic resin material for formation of a stiffener; and
simultaneously planarizing the semiconductor chip bonded to the surface of the solid device and the synthetic resin material provided around the semiconductor chip after the resin providing step, so that a surface of the semiconductor chip opposite from the active surface is flush with a surface of the synthetic resin material opposite from the solid device;
further comprising the step of filling a low elasticity filler having a lower elasticity than the stiffener in a space defined between the surface of the solid device and a surface of the semiconductor chip opposed to the solid device.
2. A process as set forth in claim 1 ,
further comprising the step of providing a heatsink plate for dissipating heat from the semiconductor chip on the surface of the semiconductor chip opposite from the solid device after the planarization step.
3. A fabrication process for a semiconductor device, comprising the steps of:
bonding a semiconductor chip to a surface of a solid device with an active surface of the semiconductor chip being opposed to the solid device;
providing a synthetic resin material to surround the periphery of the semiconductor chip with the synthetic resin material for formation of a stiffener; and
simultaneously planarizing the semiconductor chip bonded to the surface of the solid device and the synthetic resin material provided around the semiconductor chip after the resin providing step, so that a surface of the semiconductor chip opposite from the active surface is flush with a surface of the synthetic resin material opposite from the solid device;
further comprising the step of providing an inscription across the surface of the semiconductor chip opposite from the solid device and the surface of the stiffener opposite from the solid device after the planarization step.
4. A process as set forth in claim 3 , wherein the planarization step comprises the step of mirror-finishing the surface of the semiconductor chip opposite from the solid device and the surface of the stiffener opposite from the solid device.
5. A process as set forth in claim 1 , wherein the planarization step includes the step of simultaneously reducing thicknesses of the semiconductor chip and the synthetic resin material.
6. A process as set forth in claim 1 , wherein the planarization step includes the step of simultaneously polishing or grinding the surfaces of the semiconductor chip and the synthetic resin material.