Board for manufacturing a BGA and method of manufacturing semiconductor device using thereof
A device containing a flat member is provided, having a pattern for a bonding pad, a wiring, and an electrode, by half-etching through the flat member.
1. A board for manufacturing a BGA comprising:
a flat member having a first face and a second face opposite to said first face, said second face having an area for mounting a semiconductor element;
a first conductive film formed on said second face and provided at a periphery of the semiconductor element mounting area, said first conductive film corresponding to a bonding pad;
a second conductive film integrated with the first conductive film and extending to said semiconductor element mounting area, said second conductive film corresponding to a wiring integrated with the bonding pad; and
a third conductive film integrated with the second conductive film and disposed opposite to the first conductive film, said third conductive film corresponding to an electrode integrated with the wiring
wherein at least some area of the flat member not under the conductive films is partially etched through.
2. A board for manufacturing a BGA comprising:
a flat member having a first face and a second face opposite to said first face, said second face having an area for mounting a semiconductor element;
a first photo resist formed on the second face and provided at a periphery of the semiconductor element mounting area, said first photo resist corresponding to a bonding pad;
a second photo resist integrated with the first photo resist and extending to said semiconductor element mounting area, said second photo resist corresponding to a wiring integrated with the bonding pad; and
a third photo resist integrated to the second photo resist and disposed opposite to the first photo resist, said third photo resist corresponding to an electrode integrated with the wiring
wherein at least some area of the flat member not under the photo resist is partially etched through.
3. A board for manufacturing a BGA according to claim 2 , wherein a conductive film is provided at area corresponding to said bonding pad and said photo resist is formed to cover the conductive film.
4. A board for manufacturing a BGA according to claim 1 , wherein a substantially same pattern as a guide pin or a guide hole where said guides pin is inserted is formed at side parts of said flat member facing each other.
5. A board for manufacturing a BGA according to claim 1 , wherein said flat member comprises a conductive foil and said conductive film comprises material different from said conductive foil.
6. A board for manufacturing a BGA comprising:
a flat member having a first face and a second face opposite to said first face, and said second face having an area for mounting a semiconductor element; a first projection formed on said second face and provided at a periphery of the semiconductor element mounting area, said first projection corresponding to a bonding pad;
a second projection integrated with the first projection and extending to said semiconductor element mounting area, said second projection corresponding to a wiring integrated with the bonding pad; and
a third projection integrated with the second projection and disposed opposite to the first projection, said third projection corresponding to an electrode integrated with the wiring
wherein at least some area of the flat member not under the projections is partially etched through.
7. A board for manufacturing a BGA according to claim 6 , wherein a conductive film is formed on surface of said projection.
8. A board for manufacturing a BGA according to claim 7 , wherein a conductive film is formed on at least an area corresponding to said bonding pad.
9. A board for manufacturing a BGA according to claim 6 , wherein said flat member comprises a conductive foil and said conductive film comprises material different from said conductive foil.
10. A board for manufacturing a BGA according to claim 6 , wherein a substantially same pattern as a guide pin or a guide hole where said guides pin is inserted is formed at side parts of said flat member facing each other.
11. A board for manufacturing a BGA according to claim 6 , wherein a pattern of said projection is formed in a matrix manner.
12. A board for manufacturing a BGA according to claim 6 , wherein said flat member comprises Cu, Al, Fe—Ni alloy, layered product of Cu—Al, or layered product of Al—Cu—Al.
13. A board for manufacturing a BGA according to claim 6 , characterized in that side face of said projection has an anchor construction.
14. A board for manufacturing a BGA according to claim 6 , characterized in that said conductive film constructs eaves at an upper face of said projection.
15. A board for manufacturing a BGA according to claim 14 , wherein said conductive film is made of anyone of Ni, Au, Ag, and Pd.
16. A board for manufacturing a BGA comprising:
a flat member having a first face as a resin sealing area and a second face opposite to the first face, said second face having a first projection disposed thereon, a second projection, and a third projection within an area surrounded by a contact area to an upper die;
a semiconductor element mounting area within the area surrounding by the contact area;
wherein the first projection is provided at a periphery of the semiconductor element mounting area, and said projection corresponds to a bonding pad;
the second projection is integrated with the first projection and extends to said semiconductor element mounting area, and said second projection corresponds to a wiring integrated with the bonding pad;
the third projection is integrated with the second projection and disposed opposite to the first projection, said third projection corresponds to an electrode integrated with the wiring; and
at least the area surrounded by the contact area to said upper die constructs a sealing space with said second face and said upper die,
wherein at least some area of the flat member not under the projections is partially etched through.
17. The board for manufacturing a BGA according to claim 16 , further comprising:
an insulating layer disposed in the semiconductor element mounting area.
18. A board for manufacturing a BGA according to claim 1 , further comprising:
a plurality of alignment marks provided around the periphery of the flat member to facilitate dicing of the flat member.
19. A board for manufacturing a BGA according to claim 2 , further comprising:
a plurality of alignment marks provided around the periphery of the flat member to facilitate dicing of the flat member.
20. A board for manufacturing a BGA according to claim 6 , further comprising:
a plurality of alignment marks provided around the periphery of the flat member to facilitate dicing of the flat member.
21. A board for manufacturing a BGA according to claim 16 , further comprising:
a plurality of alignment marks provided around the periphery of the flat member to facilitate dicing of the flat member.