IP Library Granted Patent US 7,287,468
Granted Patent B2
US 7,287,468 · App. 10/908,883 · Granted Oct 30, 2007

Nickel alloy plated structure

Assignee: International Business Machines Corporation
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Quick Facts
Patent No.
US 7,287,468
App. No.
10/908,883
Granted
Oct 30, 2007
Kind
B2
Abstract

A structure and associated methods of formation. The structure includes a layered configuration comprising a copper layer, a first layer, and a second layer. The copper layer consists essentially of copper. The first and second layers are disposed on opposite sides of the copper layer and are in direct mechanical contact with the copper layer. The first and second layers each consist essentially of a same alloy of nickel and cobalt having a weight percent concentration of cobalt in a range of 3% to 21%. A through hole in the layered configuration extends completely through the first layer, the copper layer, and the second layer, wherein a first opening in the layered configuration extends completely through the first layer and does not extend into any portion of the second layer.

Claims (41)

1. A structure, comprising:

a layered configuration comprising a copper layer, a first layer, and a second layer, wherein the copper layer consists essentially of copper, wherein the first and second layers are disposed on opposite sides of the copper layer and are in direct mechanical contact with the copper layer, wherein the first and second layers each consist essentially of a same alloy of nickel and cobalt having a weight percent concentration of cobalt in a range of 3% to 21%, wherein a through hole in the layered configuration extends completely through the first layer, the copper layer, and the second layer, and wherein a first opening in the layered configuration extends completely through the first layer and does not extend into any portion of the second layer.

2. The structure of claim 1 , wherein the first opening does not extend into any portion of the copper layer.

3. The structure of claim 2 , said structure further comprising a substrate, wherein the layered configuration is on the substrate and in direct mechanical contact with the substrate, wherein the through hole and the first opening are filled with paste that comprises metal powder and organic material that binds the metal powder, and wherein the paste in the through hole and the first opening is in direct mechanical contact with the substrate.

4. The structure of claim 1 , wherein the first opening extends completely through the copper layer.

5. The structure of claim 4 , said structure further comprising a substrate, wherein the layered configuration is on the substrate and in direct mechanical contact with the substrate, wherein the through hole and the first opening are filled with paste that comprises metal powder and organic material that binds the metal powder, and wherein the paste in the through hole and the first opening is in direct mechanical contact with the substrate.

6. The structure of claim 1 , wherein a weight percent concentration of cobalt in the alloy does not exceed a cobalt concentration at which a fracture strain of the alloy is 2%.

7. The structure of claim 1 , wherein a weight percent concentration of cobalt in the alloy is not less than a cobalt concentration at which an ultimate tensile strength of the alloy is at least twice an ultimate tensile strength of pure nickel.

8. The structure of claim 1 , wherein a weight percent concentration of cobalt in the alloy does not exceed a cobalt concentration at which a fracture strain of the alloy is 2%.

9. The structure of claim 1 , wherein a weight percent concentration of cobalt in the alloy is not less than a cobalt concentration at which an ultimate tensile strength of the alloy is at least twice an ultimate tensile strength of pure nickel.

10. The structure of claim 1 , wherein a weight percent concentration of cobalt in the alloy is in a range of 12% to 18%.

11. A method of forming a structure, comprising:

forming a layered configuration comprising a copper layer, a first layer, and a second layer, wherein the copper layer consists essentially of copper, wherein the first and second layers are disposed on opposite sides of the copper layer and are in direct mechanical contact with the copper layer, wherein the first and second layers each consist essentially of a same alloy of nickel and cobalt having a weight percent concentration of cobalt in a range of 3% to 21%, wherein a through hole in the layered configuration extends completely through the first layer, the copper layer, and the second layer, and wherein a first opening in the layered configuration extends completely through the first layer and does not extend into any portion of the second layer.

12. The method of claim 11 , wherein the the first opening does not extend into any portion of the copper layer.

13. The method of claim 11 , wherein the first opening extends completely through the copper layer.

14. The method of claim 13 , said method further comprising:

disposing the layered configuration on a substrate and in direct mechanical contact with the substrate; and

filling the through hole and the first opening with paste that comprises metal powder and organic material that binds the metal powder, wherein the paste in the through hole and the first opening is in direct mechanical contact with the substrate.

15. The method of claim 11 , wherein a weight percent concentration of cobalt in the alloy does not exceed a cobalt concentration at which a fracture strain of the alloy is 2%.

16. The method of claim 11 , wherein a weight percent concentration of cobalt in the alloy is not less than a cobalt concentration at which an ultimate tensile strength of the alloy is at least twice an ultimate tensile strength of pure nickel.

17. The method of claim 11 , wherein a weight percent concentration of cobalt in the alloy does not exceed a cobalt concentration at which a fracture strain of the alloy is 2%.

18. The method of claim 11 , wherein a weight percent concentration of cobalt in the alloy is not less than a cobalt concentration at which an ultimate tensile strength of the alloy is at least twice an ultimate tensile strength of pure nickel.

19. The method of claim 11 , wherein a weight percent concentration of cobalt in the alloy is in a range of 12% to 18%.

20. The method of claim 11 , wherein forming the layered configuration comprises:

providing a voltage source coupled to a first anode, a second anode, and a cathode in a solution comprising nickel ions and cobalt ions, wherein the cathode is disposed between the first and second anodes, wherein the first anode and the second anode each independently comprise nickel or a nickel-cobalt alloy, wherein the cathode comprises the copper layer, wherein patterned photoresist layers are disposed on the opposite sides of the copper layer and in direct mechanical contact with the copper layer, and wherein the patterned photoresist layers each comprise photoresist material and openings in the photoresist material to form a photoresist pattern;

activating the voltage source to cause the nickel ions and cobalt ions to electroplate the opposite sides of the copper layer within the openings in the photoresist material to form opposing nickel-cobalt layers on the respective opposite sides of the copper layer;

removing the photoresist material to form openings within the opposing nickel-cobalt layers after which the first and second layers of the layered configuration respectively comprise a first nickel-cobalt layer and a second nickel-cobalt layer of the opposing nickel-cobalt layers, wherein a first opening in the first nickel-cobalt layer forms a portion of the first opening in the layered configuration that does not extend into any portion of the second nickel-cobalt layer; and

forming a first opening through the copper layer aligned between corresponding openings in the first and second nickel-cobalt layers to form the through hole in the layered configuration, wherein the through hole passes through the corresponding openings and the first opening through the copper layer.

21. The method of claim 20 , said method further comprising forming a second opening through the copper layer, wherein the second opening through the copper layer is aligned with the first opening in the first nickel-cobalt layer to extend the first opening in the layered configuration through the copper layer.

22. The method of claim 20 , wherein the cobalt ions in the solution has a weight percent concentration of 1% to 5% relative to the combination of the nickel ions and the cobalt ions in the solution.

23. The method of claim 11 , wherein forming the layered configuration comprises:

providing a voltage source coupled to a first anode, a second anode, and a cathode in a solution comprising nickel ions and cobalt ions, wherein the cathode is disposed between the first and second anodes, wherein the first anode and the second anode each independently comprise nickel or a nickel-cobalt alloy, and wherein the cathode comprises the copper layer;

activating the voltage source to cause the nickel ions and cobalt ions to electroplate the opposite sides of the copper layer to form opposing nickel-cobalt layers on the opposite sides of the copper layer, wherein the first and second layers of the layered configuration respectively comprise a first nickel-cobalt layer and a second nickel-cobalt layer of the opposing nickel-cobalt layers;

forming the through hole extending completely through the opposing nickel-cobalt layers and the copper layer; and

forming a first opening in the first nickel-cobalt layer to form a portion of the first opening in the layered configuration that does not extend into any portion of the second nickel-cobalt layer.

24. The method of claim 23 , said method further comprising forming an opening through the copper layer, wherein the opening through the copper layer is aligned with the first opening in the first nickel-cobalt layer to extend the first opening in the layered configuration through the copper layer.

25. The method of claim 23 , wherein the cobalt ions in the solution has a weight percent concentration of 1% to 5% relative to the combination of the nickel ions and the cobalt ions in the solution.

26. The method of claim 11 , said method further comprising:

disposing the layered configuration on a substrate and in direct mechanical contact with the substrate;

filling the through hole and the first opening with paste that comprises metal powder and organic material that binds the metal powder, wherein the paste in the through hole and the first opening is in direct mechanical contact with the substrate; and

removing the layered configuration, leaving a first paste-patterned sheet comprising the paste distributed on the substrate in a pattern defined by the through hole and the first opening in the layered configuration.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2015
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 036779/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 036550/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 31, 2005
From: COX, HARRY DAVID; LIU, HSICHANG; MEDAHUNSI, NIKE OLUWAKEMI; SEMKOW, KRYSTYNA WALERIA
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 016076/0013 →
Continuity (1)
Related Publication 20060269770A1 · Nov 30, 2006