Capacitor compatible with high dielectric constant materials having a low contact resistance layer and the method for forming same
A storage cell capacitor and a method for forming the storage cell capacitor having a storage node electrode including a barrier layer interposed between a conductive plug and an oxidation resistant layer. A layer of titanium silicide is fabricated to lie between the conductive plug and the oxidation resistant layer. An insulative layer protects the sidewalls of the barrier layer during the deposition and anneal of a dielectric layer having a high dielectric constant.
1. A method for fabricating a capacitor having a first and a second electrode, comprising:
forming an insulative layer on a surface;
forming an opening in the insulative layer to expose a portion of the surface;
forming a conductive plug in the opening, the conductive plug forming a first portion of the first electrode of the capacitor, the conductive plug recessed below a surface of the insulative layer;
forming a first conductive layer overlying the conductive plug, the first conductive layer forming a second portion of the first electrode;
forming a second conductive layer, for preventing diffusion of atoms, in the opening and overlying the first conductive layer such that the second conductive layer is surrounded on sidewalls by the insulative layer, the second conductive layer forming a third portion of the first electrode, the first conductive layer reducing a contact resistance between the conductive plug and the second conductive layer; and
forming a third conductive layer overlying the second conductive layer to form a fourth portion of the first electrode.
2. The method of claim 1 , wherein forming the insulative layer includes forming includes forming a layer that includes at least one of an oxide and an oxide/nitride.
3. The method of claim 1 , wherein forming the first conductive layer includes forming a layer of titanium silicide.
4. The method of claim 1 , wherein forming the second conductive layer includes forming a layer of titanium nitride.
5. The method of claim 1 , wherein forming the second conductive layer includes forming a layer containing at least one selected from a group consisting of TaN, Ti, RuO 2 and Ru.
6. The method of claim 1 , wherein forming the first conductive layer includes forming the first conductive layer substantially within the trench and overlying the conductive plug, wherein the first conductive layer is formed from a first material and the plug is formed from a second material not identical to the first material.
7. The method of claim 1 , wherein forming the first conductive layer includes forming a layer containing tungsten.
8. The method of claim 1 , wherein forming the first conductive layer includes forming a layer containing at least one selected from a group consisting of cobalt, tantalum, and molybdenum.
9. A method for fabricating a capacitor having a first and a second electrode, comprising:
forming an insulative layer overlying a surface;
forming an opening in the insulative layer to expose a portion of the surface;
forming a conductive plug in the opening, the conductive plug forming a first portion of the first electrode of the capacitor, the conductive plug recessed below a surface of the insulative layer;
forming a first conductive layer overlying the conductive plug, the first conductive layer forming a second portion of the first electrode;
forming a second conductive layer, for preventing diffusion of atoms, in the opening and overlying the first conductive layer such that the second conductive layer is surrounded on sidewalls by the insulative layer, the second conductive layer forming a third portion of the first electrode, the first conductive layer reducing a contact resistance between the conductive plug and the second conductive layer;
forming a third conductive layer overlying the second conductive layer to form a fourth portion of the first electrode;
forming a dielectric layer to overlie the third conductive layer, the third conductive layer and the insulative layer substantially preventing oxidation of the second conductive layer; and
forming the second electrode overlying the dielectric layer, the first and the second electrode and the dielectric layer forming the capacitor.
10. The method of claim 9 , wherein forming a dielectric layer includes forming the dielectric layer that includes a material chosen from a group of materials consisting of Ba x Sr (1-x) TiO 3 , BaTiO 3 , SrTiO 3 , PbTiO 3 , Pb(Zr,Ti)O 3 , (Pb,La) (Zr,Ti)O 3 , (Pb,La)TiO 3 , KNO 3 , and LiNbO 3 .
11. The method of claim 9 , wherein forming the second conductive layer includes forming the second conductive layer to prohibit silicon diffusion.
12. The method of claim 9 , wherein forming the second conductive layer includes forming the second conductive layer to include a material selected from groups consisting of refractory metals, conductive metal oxides, and metal nitrides.
13. The method of claim 9 , wherein forming the second conductive layer includes forming the second conductive layer to include a material selected from a group of materials consisting of Ta, TiN, TaN, Ti, RuO 2 , Ru.
14. The method of claim 9 , wherein forming the first conductive layer includes forming a layer of titanium suicide.
15. The method of claim 9 , wherein forming the dielectric layer comprises:
applying temperatures capable of oxidizing said second conductive layer; and
preventing the second conductive layer from oxidizing during applying temperatures.
16. The method of claim 9 , wherein forming the second electrode comprises sputtering an electrically conductive material to overlie the dielectric layer.
17. A method for fabricating a capacitor having a first and a second electrode, comprising:
forming an insulative layer overlying a surface;
forming an opening in the insulative layer to expose a portion of the surface;
forming a conductive plug in the opening, the conductive plug forming a first portion of the first electrode of the capacitor, the conductive plug recessed below a surface of the insulative layer;
forming a first conductive layer overlying the conductive plug, the first conductive layer forming a second portion of the first electrode;
forming a second conductive layer, for preventing diffusion of atoms, in the opening and overlying the first conductive layer such that the second conductive layer is surrounded on sidewalls by the insulative layer, the second conductive layer forming a third portion of the first electrode, the first conductive layer increasing conductivity between the conductive plug and the second conductive layer;
forming a third conductive layer overlying the second conductive layer to form a fourth portion of the first electrode;
forming a dielectric layer to overlie the third conductive layer;
during forming the dielectric layer, inhibiting oxidation of the second conductive layer using the third conductive layer and the insulative layer; and
forming the second electrode overlying the dielectric layer, the first and the second electrode and the dielectric layer forming the capacitor.
18. The method of claim 17 , wherein forming the dielectric layer comprises depositing a dielectric material from a group of materials consisting of Ba x Sr (1-x) TiO 3 , BaTiO 3 , SrTiO 3 , PbTiO 3 , Pb(Zr,Ti)O 3 , (Pb,La)(Zr,Ti)O 3 , (Pb,La)TiO 3 , KN 0 3 , and LiNbO 3 .
19. The method of claim 17 , wherein forming the insulative layer includes forming includes forming a layer that includes at least one of an oxide and an oxide/nitride.
20. The method of claim 17 , wherein forming the first conductive layer includes forming a layer of titanium suicide.
21. The method of claim 17 , wherein forming the second conductive layer includes forming a layer of titanium nitride.
22. The method of claim 17 , wherein forming the second conductive layer includes forming a layer containing at least one selected from a group consisting of TaN, Ti, RuO 2 and Ru.
23. The method of claim 17 , wherein forming the first conductive layer includes forming the first conductive layer substantially within the trench and overlying the conductive plug, wherein the first conductive layer is formed from a first material and the plug is formed from a second material not identical to the first material.
24. The method of claim 17 , wherein forming the first conductive layer includes forming a layer containing tungsten.
25. The method of claim 17 , wherein forming the first conductive layer includes forming a layer containing at least one selected from a group consisting of cobalt, tantalum, and molybdenum.
26. The method of claim 17 , wherein forming the dielectric layer comprises:
applying temperatures capable of oxidizing said second conductive layer; and
preventing the second conductive layer from oxidizing during applying temperatures.
27. The method of claim 17 , wherein forming the second electrode comprises sputtering an electrically conductive material to overlie the dielectric layer.
28. A method for fabricating a capacitor having a first and a second electrode, comprising:
forming an insulative layer, including an oxide, overlying a substrate surface;
etching an opening in the insulative layer to expose a portion of the surface;
forming a polysilicon conductive plug in the opening, the conductive plug forming a first portion of the first electrode of the capacitor, the conductive plug recessed below a surface of the insulative layer;
forming a first conductive layer overlying the conductive plug, the first conductive layer forming a second portion of the first electrode and including titanium silicide;
forming a second conductive layer, for preventing diffusion of atoms, in the opening and overlying the first conductive layer such that the second conductive layer is surrounded on sidewalls by the insulative layer, the second conductive layer forming a third portion of the first electrode, the first conductive layer reducing a contact resistance between the conductive plug and the second conductive layer and including titanium nitride;
forming a platinum, third conductive layer overlying the second conductive layer to form a fourth portion of the first electrode;
forming a dielectric layer to overlie the third conductive layer, the third conductive layer and the insulative layer substantially preventing oxidation of the second conductive layer, wherein the dielectric layer comprises a dielectric material from a group of materials consisting of Ba x Sr (1-x) TiO 3 , BaTiO 3 , SrTiO 3 , PbTiO 3 , Pb(Zr,Ti)O 3 , (Pb,La)(Zr,Ti)O 3 , (Pb,La)TiO 3 , KNO 3 , and LiNbO 3 ; and
forming the second electrode overlying the dielectric layer, the first and the second electrode and the dielectric layer forming the capacitor.
29. The method of claim 28 , wherein forming the second electrode includes platinum.
30. The method of claim 28 , wherein forming the second electrode includes titanium nitride.
31. The method of claim 28 , wherein forming the dielectric layer comprises:
applying temperatures capable of oxidizing said second conductive layer; and
preventing the second conductive layer from oxidizing during applying temperatures.
32. The method of claim 28 , wherein forming the second electrode comprises sputtering an electrically conductive material to overlie the dielectric layer.
33. The method of claim 28 , wherein forming the conductive plug comprises depositing in-situ doped polysilicon in the opening.