Strained germanium-on-insulator device structures
The benefits of strained semiconductors are combined with silicon-on-insulator approaches to substrate and device fabrication.
1. A structure comprising:
a substrate having a dielectric layer disposed thereon; and
a strained semiconductor layer disposed in contact with the dielectric layer,
wherein the strained semiconductor layer comprises approximately 100% germanium and the dielectric layer consists essentially of silicon dioxide.
2. The structure of claim 1 , further comprising:
a transistor including:
a gate disposed above the strained semiconductor layer, the gate comprising a material selected from the group consisting of a doped semiconductor, a metal, and a metallic compound.
3. The structure of claim 2 , further comprising:
a gate dielectric layer disposed between the strained semiconductor layer and the gate.
4. The structure of claim 3 , wherein the gate dielectric layer comprises silicon dioxide.
5. The structure of claim 3 , wherein the gate dielectric layer comprises a high-k material with a dielectric constant higher than that of silicon dioxide.
6. The structure of claim 2 , wherein the gate comprises a doped semiconductor, and the doped semiconductor comprises a material selected from the group consisting of polycrystalline silicon and polycrystalline silicon-germanium.
7. The structure of claim 2 , wherein the gate comprises a metal, and the metal comprises a material selected from the group consisting of titanium, tungsten, molybdenum, tantalum, nickel, and iridium.
8. The structure of claim 2 , wherein the gate consists essentially of a metal compound, and the metal compound comprises a material selected from the group consisting of titanium nitride, titanium silicon nitride, tungsten nitride, tantalum nitride, tantalum silicide, nickel silicide, and iridium oxide.
9. The structure of claim 2 , further comprising:
an overlayer disposed above the strained semiconductor layer,
wherein the overlayer induces at least a portion of the strain in the strained semiconductor layer.
10. The structure of claim 9 , wherein the overlayer comprises silicon nitride.
11. The structure of claim 1 , wherein the strained semiconductor layer is compressively strained.
12. The structure of claim 1 , wherein a composition of the strained semiconductor layer is substantially uniform throughout a thickness thereof.
13. A structure comprising:
a substrate having a dielectric layer disposed thereon; and
a strained semiconductor layer disposed in contact with the dielectric layer, wherein the strained semiconductor layer is tensilely strained and comprises approximately 100% germanium and the dielectric layer comprises silicon dioxide.