Semiconductor device and manufacturing method thereof
Junction leakage in a medium voltage MOS transistor having a silicide structure is prevented. A titanium layer is formed by sputtering titanium over the entire surface of a semiconductor substrate. A gate electrode makes contact with the titanium layer through an opening and P + -type diffusion layers make contact with the titanium layer through openings. In subsequent heat treatment, portions of the titanium layer contacting the gate electrode or each of the P + -type diffusion layers are changed into silicide, forming titanium silicide layers on the gate electrode and the P + -type diffusion layers. Then the rest of the titanium layer, which is on the silicide block layer and not changed into silicide, is removed by wet-etching.
1. A method of manufacturing a semiconductor device, comprising:
forming a gate insulation film on a semiconductor substrate;
forming a gate electrode on the gate insulation film;
forming a sidewall spacer on a sidewall of the gate electrode;
forming a low concentration diffusion layer in a surface of the semiconductor substrate adjacent the gate electrode;
forming a high concentration diffusion layer in the surface of the semiconductor substrate away from the sidewall spacer;
forming, after the formation of the low and high concentration diffusion layers, a silicide block layer on the surface of the semiconductor substrate and a surface of the gate electrode so that the silicide block layer is in contact with the low concentration diffusion layer and the sidewall spacer;
patterning the silicide block layer so as to expose a portion of the gate electrode and so as to form an opening contained within an lateral area of a top surface of the high concentration diffusion layer to expose a portion of the high concentration diffusion layer, the opening being defined only by a patterned edge of the silicide block layer and being smaller than the lateral area of the top surface of the high concentration diffusion layer;
depositing a metal layer on the surface of the semiconductor substrate and the surface of the gate electrode;
heating the semiconductor substrate so that the metal layer in contact with the exposed portions of the gate electrode and the high concentration diffusion layer becomes a metal silicide; and
removing the metal layer to expose the silicide block layer.
2. The method of claim 1 , wherein the metal silicide comprises titanium silicide.
3. The method of claim 1 , wherein the silicide block layer comprises a silicon oxide film.
4. The method of claim 3 , wherein the metal suicide comprises titanium silicide.