Grounding front-end-of-line structures on a SOI substrate
View Patent ↗Structures and a method are disclosed for grounding gate-stack and/or silicon active region front-end-of-line structures on a silicon-on-insulator (SOI) substrate, which may be used as test structures for VC inspection. In one embodiment, a structure includes a grounded bulk silicon substrate having the SOI substrate thereover, the SOI substrate including a silicon-on-insulator (SOI) layer and a buried oxide (BOX) layer; the silicon active region having at least one finger element within the SOI layer, the at least one finger element isolated by a shallow trench isolation (STI) layer; and a polysilicon ground intersecting the at least one finger element and extending through the STI layer and the BOX layer to the grounded bulk silicon substrate, the polysilicon ground contacting the silicon active region and the grounded bulk silicon substrate.
1. A structure comprising:
a grounded bulk silicon substrate having a silicon-on-insulator (SOI) substrate thereover, the SOI substrate including a silicon-on-insulator (SOI) layer and a buried oxide (BOX) layer;
a silicon active region having a plurality of finger elements within the SOI layer, each finger element separated from an adjacent finger element by a portion of a shallow trench isolation (STI) layer;
a polysilicon ground intersecting the plurality of finger elements and extending through the STI layer and the BOX layer to the grounded bulk silicon substrate, the polysilicon ground contacting the silicon active region and the grounded bulk silicon substrate; and
a barrier layer over the SOI layer, the polysilicon ground extending through the barrier layer,
wherein the polysilicon ground includes a polysilicon filled trench,
wherein the polysilicon ground contacts a sidewall of the silicon active region, and replaces a part of the STI layer between the plurality of finger elements.
2. The structure of claim 1 , wherein the silicon active region is a part of a voltage contrast test structure.
3. The structure of claim 1 , wherein the silicon active region is part of a product chip and is positioned for charge dissipation.