Self heating monitor for SiGe and SOI CMOS devices
View Patent ↗A structure, apparatus and method for deterring the temperature of an active region in semiconductor, particularly a FET is provided. A pair FETs are arranged on a silicon island a prescribed distance from one another where the silicon island is surrounded by a thermal insulator. One FET is heated by a current driven therethrough. The other FET functions as a temperature sensor by having a change in an electrical characteristic versus temperature monitored. By arranging multiple pairs of FETs separated by different known distances, the temperature of the active region of one of the FETs may be determined during operation at various driving currents.
1. An apparatus for determining the temperature of an active region of a semiconductor device, comprising:
three silicon sections;
three pairs of active regions, wherein each pair of active regions is arranged on a respective silicon section, wherein each pair of active regions is configurable to produce and sense heat; and
three thermal conductors, wherein each thermal conductor is arranged between each active region of each respective pair of active regions and has a different prescribed length.
2. The apparatus of claim 1 , wherein each silicon section is substantially thermally isolated from each other silicon section.
3. The apparatus of claim 1 , wherein at least one prescribe length of each prescribed length is in a range from about 0.1 μm to about 5.0 μm.
4. The apparatus of claim 1 , wherein:
the each pair of active regions comprises a heating region and a sensing region,
the each heating region converts electrical energy into thermal energy, and
the each sensing region senses heat by changing an electrical characteristic of the sensing region in accordance with the sensed heat.
5. An apparatus for determining the temperature of an active region of a semiconductor device, comprising:
three silicon sections;
three pairs of active regions, wherein each pair of active regions is arranged on a respective silicon section, wherein each pair of active regions is configurable to produce and sense heat; and
three thermal conductors, wherein each thermal conductor is arranged between each active region of each respective pair of active regions and has a different prescribed length,
wherein:
the each pair of active regions comprises a heating region and a sensing region,
the each heating region converts electrical energy into thermal energy, and
the each sensing region senses heat by changing an electrical characteristic of the sensing region in accordance with the sensed heat, and
wherein the electrical characteristic comprises drain current versus gate bias voltage, a sub-threshold voltage slope swing.
6. An apparatus for determining the temperature of an active region of a semiconductor device, comprising:
three silicon sections;
three pairs of active regions, wherein each pair of active regions is arranged on a respective silicon section, wherein each pair of active regions is configurable to produce and sense heat;
three thermal conductors, wherein each thermal conductor is arranged between each active region of each respective pair of active regions and has a different prescribed length;
a heating field effect transistor and a corresponding sensing field effect transistor arranged in each of the three active regions; and
in each of the three active regions, a common source contact leading to a source of both the heating field effect transistor and the corresponding sensing field effect transistor.