Semiconductor device with recess portion over pad electrode
View Patent ↗A manufacturing method of a semiconductor device formed in a chip size package is improved to enhance a yield and reliability. A window to expose first wirings is formed only in a region of a semiconductor substrate where the first wirings exist. As a result, area of the semiconductor substrate bonded to a supporting body through an insulation film and a resin is increased to prevent cracks in the supporting body and separation of the semiconductor substrate from the supporting body. A slit is formed along a dicing line after forming the window, the slit is covered with a protection film and then the semiconductor substrate is diced into individual semiconductor dice. Thus, separation on a cut surface or at an edge of the semiconductor dice, which otherwise would be caused by contact of the blade in the dicing can be prevented.
1. A semiconductor device comprising:
a semiconductor die having an insulation film formed on a front surface thereof;
a first wiring formed on the insulation film;
a supporting body disposed on the insulation film and the first wiring;
an adhesive layer attaching the supporting body to the front surface of the semiconductor die so as to cover all lateral edges of the first wiring;
a recess portion formed in the semiconductor die and extending from a side of the semiconductor die horizontally with respect to the front surface and extending from a back surface of the semiconductor die vertically with respect to the front surface so as to extend into the supporting body; and
a second wiring disposed in the recess portion so as to be connected to the first wiring; and
a protection film disposed on the second wiring so as to be in contact with a side surface of the supporting body,
wherein, in plan view of the semiconductor device, a length of the recess portion along said side of the semiconductor die is shorter than a length of the semiconductor die along said side of the semiconductor die, and
in plan view of the semiconductor device a part of the first wiring is in the recess portion and not covered by the semiconductor die, and another part of the first wiring is covered by the semiconductor die.
2. The semiconductor device of claim 1 , wherein part of the first wiring is disposed between the semiconductor die and the supporting body.
3. The semiconductor device of claim 2 , wherein the length of the recess portion along said side of the semiconductor die is shorter than a length of the first wiring along said side of the semiconductor die so that both ends of the first wiring along said side of the semiconductor die are covered by the semiconductor die.
4. The semiconductor device of claim 2 , wherein the recess portion extends horizontally so as not to reach a side of the first wiring that is normal to said side of the semiconductor die.