Semiconductor device
A semiconductor device includes a semiconductor substrate; a sealing resin layer formed on a top face of the semiconductor substrate; a metal post formed on the top face of the semiconductor substrate such that a top face of the metal post is exposed through the sealing resin layer; a projecting electrode formed on the top face of the metal post; and a low-elasticity resin layer made of a resin material with an elasticity modulus lower than that of the sealing resin layer and formed on the top face of the sealing resin layer such that part of the low-elasticity resin layer lies between the projecting electrode and the sealing resin layer.
1. A semiconductor device comprising:
a semiconductor substrate;
a sealing resin layer formed on a top face of the semiconductor substrate;
a metal post formed on the top face of the semiconductor substrate such that a top face of the metal post is exposed through the sealing resin layer;
a projecting electrode formed on the top face of the metal post; and
a low-elasticity resin layer made of a resin material with an elasticity modulus lower than an elasticity modulus of the sealing resin layer, the low-elasticity resin layer being formed on the top face of the sealing resin layer such that at least part of the low-elasticity resin layer lies between the projecting electrode and the sealing resin layer.
2. The semiconductor device according to claim 1 , wherein the low-elasticity resin layer is formed in a circumferential part of the metal post as seen in a plan view.
3. The semiconductor device according to claim 1 , wherein the low-elasticity resin layer covers the whole top face of the sealing resin layer.
4. The semiconductor device according to claim 1 , wherein the low-elasticity resin layer is formed of polyimide.
5. The semiconductor device according to claim 1 , wherein the projecting electrode is formed of solder.