Electrical contact structure having multiple metal interconnect levels staggering one another
View Patent ↗An electrical contact structure distributes current along a length thereof. The electrical contact structure includes a plurality of n metal rectangles on n levels of metal. The rectangle on one metal level is at least as wide in width and vertically covers in width the rectangle on the metal level immediately below. The rectangle on one metal level is shorter in length than and substantially aligned at a first end with the rectangle on the metal level immediately below. Rectangle first ends are substantially aligned. Features of an exemplary FET transistor of this invention are a source and drain terminal electrical contact structure, a multi-level metal ring connecting gate rectangles on both ends, and a wider-than-minimum gate-to-gate spacing. The invention is useful, for example, in an electromigration-compliant, high performance transistor.
1. An electrical contact structure, wherein the electrical contact structure distributes current along a length thereof, the electrical contact structure comprising:
a plurality of n metal rectangles on n levels of metal, wherein each of the n metal rectangles includes a first end, wherein a rectangle on at least one metal level is_wider in width than a width of a rectangle on a metal level immediately below and vertically covers the width of the rectangle on the metal level immediately below, wherein the rectangle on one metal level is shorter in length than the rectangle on the metal level immediately below, and wherein the first ends of each of the n metal rectangles are substantially aligned, wherein the electrical contact structure is an electrical contact for a drain or source region of a transistor, and wherein the first ends of each of the n metal rectangles are vertically aligned within the drain or source region.
2. The electrical contact structure of claim 1 , wherein the metal rectangle on each metal level except the lowest metal level is coupled with the metal rectangle on the metal level immediately below.
3. The electrical contact structure of claim 2 , wherein the rectangle on the one metal level, which is wider in width than the rectangle on the metal level immediately below, is shorter in length than the rectangle on the metal level immediately below, and is disposed on a current input/output end of the electrical contact structure.
4. The electrical contact structure of claim 1 , wherein n is three.
5. The electrical contact structure of claim 1 , wherein n is at least four.
6. The electrical contact structure of claim 1 , wherein the rectangle first ends provide a current input/output end of the electrical contact structure.