Treatment liquid permeation unit and treating apparatus
A treatment liquid permeation unit comprises: at least one vibration unit; and a vibration transmission unit for transmitting a vibration from the vibration unit. The vibration transmission unit is positioned between an adhesive with which a wafer is combined to a supporting plate or an adhesive adhered to a surface of the wafer and the vibration unit. A vibration from the vibration unit is transmitted via the vibration transmission unit. This promotes the treatment liquid for dissolving the adhesive to permeate the adhesive to which the treatment liquid is supplied. Therefore, the treatment liquid can more uniformly permeate the adhesive in a shorter time. This allows the treatment liquid for dissolving the adhesive to permeate the adhesive with which the wafer is combined to the supporting plate or to permeate the adhesive adhered to the surface of the wafer in a shorter time.
1. A treatment liquid permeation unit, which allows a treatment liquid to permeate an adhesive with which a substrate is combined to a supporting plate supporting the substrate or to permeate a material adhered to a surface of the substrate, said treatment liquid permeation unit comprising:
at least one vibration unit; and
a vibration transmission unit provided between said adhesive or said adhered material and said vibration unit so as to transmit a vibration from said vibration unit to said adhesive or said adhered material to which the treatment liquid is supplied, wherein:
said vibration transmission unit is filled with a liquid; and
said liquid is the treatment liquid which permeates said adhesive or which is supplied to said adhered material.
2. The treatment liquid permeation unit as set forth in claim 1 , wherein said vibration transmission unit internally has a surface which faces the adhesive or the adhered material and a surface opposite to that surface so that at least one of the surfaces is partially uneven.
3. The treatment liquid permeation unit as set forth in claim 1 , wherein said vibration transmission unit has a surface which faces the adhesive or the adhered material so that the surface is partially uneven.
4. The treatment liquid permeation unit as set forth in claim 1 , wherein said vibration transmission unit includes: an inlet for infusing the liquid into the vibration transmission unit; and an outlet for discharging the liquid from the vibration transmission unit.
5. The treatment liquid permeation unit as set forth in claim 1 , wherein said vibration unit is movably provided on said vibration transmission unit so as to be positioned in a surface opposite to the surface which faces said adhesive or said adhered material.
6. The treatment liquid permeation unit as set forth in claim 1 , further comprising: a treatment liquid supply unit, having a treatment liquid inlet for supplying the treatment liquid to said adhesive or to said adhered material; and a treatment liquid outlet for discharging the supplied treatment liquid.
7. The treatment liquid permeation unit as set forth in claim 1 , further comprising a protrusion, formed on said vibration transmission unit so as to be positioned in a rim of the surface which faces said adhesive or said adhered material, for keeping a treatment liquid, which exists between the vibration transmission unit and the adhesive or between the vibration transmission unit and the adhered material, by a surface tension.
8. A treating apparatus, comprising:
a treatment liquid supply means for supplying a treatment liquid to an adhesive with which a substrate is combined to a supporting plate supporting the substrate or to a material adhered to a surface of the substrate; and
a treatment liquid permeation unit which allows said treatment liquid to permeate said adhesive or said adhered material to which said treatment liquid is supplied,
said treatment liquid permeation unit comprising:
at least one vibration unit; and
a vibration transmission unit provided between said adhesive or said adhered material and said vibration unit so as to transmit a vibration from said vibration unit to said adhesive or said adhered material to which the treatment liquid is supplied,
wherein:
said vibration transmission unit is filled with a liquid; and
said liquid is the treatment liquid which permeates said adhesive or which is supplied to said adhered material.