Barrier layer formation for metal interconnects through enhanced impurity diffusion
A method of forming a barrier layer for metal interconnects of an integrated circuit device includes forming a first cap layer over a top surface of a conductive line of the integrated circuit device in a manner that facilitates a controllable dose of oxygen provided to the top surface of the conductive line, the conductive line comprising a metal formed over a seed layer that is an impurity alloy of the metal; and annealing the integrated circuit device so as to combine diffused impurity atoms of the seed layer with the controllable dose of oxygen, thereby forming an impurity oxide layer at an interface between the first cap layer and the top surface of the conductive line.
1. A method of forming a barrier layer for metal interconnects of an integrated circuit device, the method comprising:
forming a conductive line in an insulating layer of the semiconductor device by forming a metal material over a seed layer that is an impurity alloy of the metal;
forming a first cap layer over a top surface of the conductive line, wherein oxygen is a constituent element of the first cap layer;
forming a second cap layer over the first cap layer, the second cap layer comprising an oxygen blocking cap layer; and
following forming the second cap layer, forming subsequent device layers of the integrated circuit device using thermal processing so as to combine diffused impurity atoms of the seed layer with oxygen released by the first cap layer, thereby forming an impurity oxide layer at an interface between the first cap layer and the top surface of the conductive line, wherein the first cap layer provides a controllable oxygen source for combining with the impurity atoms.
2. The method of claim 1 , wherein the first cap layer comprises one or more of SiCOH, SiON, and SiOCNH.
3. The method of claim 1 , wherein the second cap layer comprises one of more of SiN and SiCN.
4. The method of claim 1 , wherein the metal comprises copper (Cu), and the impurity alloy of copper comprises one of more of: manganese (Mn), aluminum (Al), chromium (Cr) and vanadium (Va).