IP Library Granted Patent US 8,558,332
Granted Patent B2
US 8,558,332 · App. 13/041,226 · Granted Oct 15, 2013

Spin-current switched magnetic memory element suitable for circuit integration and method of fabricating the memory element

Inventors: Jonathan Zanhong Sun (Shrub Oak, NY); Rolf Allenspach (Adliswil, CH); Stuart Stephen Papworth Parkin (San Jose, CA); John Casimir Slonczewski (Katonah, NY); Bruce David Terris (Sunnyvale, CA)
Assignee: International Business Machines Corporation
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Quick Facts
Patent No.
US 8,558,332
App. No.
13/041,226
Granted
Oct 15, 2013
Kind
B2
Abstract

A method of fabricating a spin-current switched magnetic memory element includes providing a wafer having a bottom electrode, forming a plurality of layers, such that interfaces between the plurality of layers are formed in situ, in which the plurality of layers includes a plurality of magnetic layers, at least one of the plurality of magnetic layers having a perpendicular magnetic anisotropy component and including a current-switchable magnetic moment, and at least one barrier layer formed adjacent to the plurality of magnetic layers, lithographically defining a pillar structure from the plurality of layers, and forming a top electrode on the pillar structure.

Claims (21)

1. A method of fabricating a spin-current switched magnetic memory element, said method comprising:

providing a wafer having a bottom electrode;

forming a plurality of layers, such that interfaces between said plurality of layers are formed in situ, said plurality of layers comprising:

a plurality of magnetic layers, at least one of said plurality of magnetic layers possessing a perpendicular magnetic anisotropy component and comprising a spin-current-switchable magnetic moment; and

at least one barrier layer formed adjacent to said plurality of magnetic layers;

lithographically defining a pillar structure from said plurality of layers; and

forming a top electrode on said pillar structure.

2. The method according to claim 1 , wherein said at least one barrier layer comprises a plurality of barrier layers which are alternately formed with said plurality of magnetic layers.

3. A spin-current switched magnetic memory element, comprising:

first and second leads;

a pillar formed between said first and second leads;

a plurality of magnetic layers, at least one of said plurality of magnetic layers possessing a perpendicular magnetic anisotropy component and comprising a spin-current-switchable magnetic moment, all magnetic moments in said magnetic layers being substantially collinear in a rest state; and

at least one barrier layer formed in said pillar adjacent to said plurality of magnetic layers.

4. A magnetic random access memory (MRAM) array comprising a plurality of magnetic spin-current switched magnetic memory elements according to claim 3 .

5. The spin-current switched magnetic memory element according to claim 3 , wherein said perpendicular magnetic anistropy component has a magnitude sufficient to at least substantially offset an easy-plane demagnetization effect.

6. The spin-current switched magnetic memory element according to claim 5 , wherein a magnetic moment of one of said plurality of magnetic layers is most efficiently excitable or switchable under spin current excitation.

7. The method according to claim 1 , wherein said perpendicular magnetic anistropy component has a magnitude sufficient to at least substantially offset an easy-plane demagnetization effect, such that a magnetic moment of one of said plurality of magnetic layers comprises resting out of the layer plane and is most efficiently excitable or switchable under spin current excitation.

8. The method according to claim 1 , wherein said perpendicular magnetic anistropy component has a magnitude sufficient to at least substantially offset an easy-plane demagnetization effect.

9. The method according to claim 8 , wherein a magnetic moment of one of said plurality of magnetic layers is resting out of the layer plane.

10. The method according to claim 8 , wherein a magnetic moment of one of said plurality of magnetic layers is most efficiently excitable or switchable under spin current excitation.

11. The method according to claim 1 , wherein a magnetic moment of one of said plurality of magnetic layers comprises one of resting out of the layer plane and is most efficiently excitable or switchable under spin current excitation.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2015
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 036779/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 036550/0001 →
Continuity (3)
Division 12548428 · Aug 27, 2009
Division 10715376 · Nov 19, 2003
Related Publication 20110147866A1 · Jun 23, 2011