Contact elements of semiconductor devices comprising a continuous transition to metal lines of a metallization layer
In sophisticated semiconductor devices, contact elements in the contact level may be formed by patterning the contact openings and filling the contact openings with the metal of the first metallization layer in a common deposition sequence. To this end, in some illustrative embodiments, a sacrificial fill material may be provided in contact openings prior to depositing the dielectric material of the first metallization layer.
1. A method of forming a contact element in a semiconductor device, the method comprising:
forming a sacrificial fill material in a contact opening formed in an interlayer dielectric material, said contact opening connecting to a contact area of a circuit element formed in a semiconductor region of said semiconductor device;
after forming said sacrificial fill material, forming a dielectric material of a metallization layer above said interlayer dielectric material and said sacrificial fill material;
forming a trench in said dielectric material so as to connect to said contact opening;
removing said sacrificial fill material through said trench; and
filling said contact opening and said trench with a conductive material.
2. The method of claim 1 , wherein forming said dielectric material layer comprises forming an etch stop layer above said interlayer dielectric material and forming a dielectric layer on said etch stop layer.
3. The method of claim 2 , wherein forming a trench in said dielectric material comprises patterning said dielectric layer by using said etch stop layer as an etch stop and patterning said etch stop layer.
4. The method of claim 1 , wherein forming said dielectric material comprises forming a substantially homogeneous material composition on said interlayer dielectric material and said sacrificial fill material.
5. The method of claim 1 , wherein filling said trench and said contact opening with a conductive material comprises forming a conductive barrier material on inner surface areas of said contact opening and said trench and depositing a metal-containing material on said conductive barrier material.
6. The method of claim 1 , wherein filling said contact opening and said trench with a conductive material comprises depositing at least one of copper and silver.
7. The method of claim 1 , wherein said contact opening and said trench are filled by performing a deposition process sequence commonly for filling said contact opening and said trench.
8. The method of claim 1 , wherein removing said sacrificial fill material comprises performing at least one of a plasma-assisted removal process and a wet chemical etch process.
9. The method of claim 1 , wherein removing said sacrificial fill material comprises performing an evaporation process.
10. The method of claim 1 , wherein forming said sacrificial fill material in said contact opening comprises forming a sacrificial material layer above said interlayer dielectric material and removing excess material by performing at least one of an etch process and a polishing process.
11. A method, comprising:
forming a contact opening in an interlayer dielectric material formed above and adjacent to a circuit element of a semiconductor device;
after forming said contact opening, forming a dielectric material of a first metallization layer above said interlayer dielectric material and said contact opening;
forming a trench of a metal line of said first metallization layer in said dielectric material so as to connect to said contact opening; and
filling said contact opening and said trench with a conductive material by performing a deposition sequence commonly for said contact opening and said trench.
12. The method of claim 11 , further comprising filling said contact opening with a sacrificial fill material prior to forming said dielectric material.
13. The method of claim 12 , further comprising removing said sacrificial fill material after forming said trench.
14. The method of claim 11 , wherein forming said dielectric material comprises depositing material above said contact opening so as to substantially close an upper portion of said contact opening.
15. The method of claim 11 , wherein forming said dielectric material comprises forming a first dielectric layer above said interlayer dielectric material and forming a second dielectric layer above said first dielectric layer.
16. The method of claim 14 , further comprising planarizing at least a portion of said material prior to forming said trench.
17. The method of claim 14 , wherein substantially closing off an upper portion of said contact opening comprises leaving a void space in said contact opening below said dielectric material.