Highly scalable trench capacitor
An improved trench structure, and method for its fabrication are disclosed. Embodiments of the present invention provide a trench in which the collar portion has an air gap instead of a solid oxide collar. The air gap provides a lower dielectric constant. Embodiments of the present invention can therefore be used to make higher-performance devices (due to reduced parasitic leakage), or smaller devices, due to the ability to use a thinner collar to achieve the same performance as a thicker collar comprised only of oxide (with no air gap). Alternatively, a design choice can be made to achieve a combination of improved performance and reduced size, depending on the application.
1. A method for fabricating a trench structure comprising the steps of:
forming spacers on trench sidewalls on a trench within a substrate;
depositing a trench conductor within the trench, whereby the trench conductor is disposed between the spacers;
removing a portion of the spacers; and
depositing a non-conformal material, thereby forming a collar, said collar comprising an inner wall and an outer wall, and wherein said collar comprises a cavity, said cavity disposed between the inner wall and outer wall of said collar; and
removing a portion of the non-conformal material.
2. The method of claim 1 , further comprising the step of:
forming an oxide liner on the trench conductor, and the outer wall of said collar.
3. The method of claim 1 , wherein the step of forming spacers on trench sidewalls comprises the steps of:
depositing an oxide within the trench; and
performing a first etch of the oxide.
4. The method of claim 1 , wherein the step of depositing a non-conformal material is performed via chemical vapor deposition.
5. The method of claim 1 , further comprising the step of performing a thermal anneal at a temperature ranging from about 850 degrees Centigrade to about 1000 degrees Centigrade for a duration ranging from about 10 minutes to about 1 hour.
6. The method of claim 5 , wherein the step of performing a thermal anneal is performed after the step of removing a portion of the non-conformal material.
7. The method of claim 5 , wherein the step of performing a thermal anneal is performed before the step of removing a portion of the non-conformal material.