Trench isolation structures and methods for bipolar junction transistors
View Patent ↗Device structures, fabrication methods, and design structures for a bipolar junction transistor. A first isolation region is formed in a substrate to define a lateral boundary for an active device region and an intrinsic base layer is formed on the substrate. The intrinsic base layer has a section overlying the active device region. After the intrinsic base layer is formed, the first isolation region is partially removed adjacent to the active device region to define a trench that is coextensive with the substrate in the active device region and that is coextensive with the first isolation region. The trench is at least partially filled with a dielectric material to define a second isolation region.
1. A method of fabricating a bipolar junction transistor, the method comprising:
forming a first isolation region in a substrate to define a lateral boundary for an active device region;
forming an intrinsic base layer on the substrate and having a first section overlying the active device region;
after the intrinsic base layer is formed, partially removing the first isolation region adjacent to the active device region without penetrating through the first isolation region and into the substrate beneath the first isolation region to define a trench that is coextensive with the substrate in the active device region; and
at least partially filling the trench with a dielectric material to define a second isolation region.
2. The method of claim 1 wherein the intrinsic base layer includes a second section on the first isolation region, and partially removing the first isolation region adjacent to the active device region further comprises:
extending the trench through the second section of the intrinsic base layer and into the first isolation region with an etching process.
3. The method of claim 1 further comprising:
removing a portion of the substrate in the active device region to define a lateral extension of the trench beneath the first section of the intrinsic base layer.
4. The method of claim 1 further comprising:
forming a collector in the active device region of the substrate;
after the second isolation region is defined, forming an extrinsic base layer on the intrinsic base layer; and
after forming the extrinsic base layer, forming an emitter coupled with the intrinsic base layer.
5. The method of claim 1 wherein the dielectric material of the second isolation region has a lower dielectric constant than a dielectric material comprising the first isolation region.
6. The method of claim 1 wherein the first isolation region includes a divot at the lateral boundary for the active device region, and the divot is removed when the first isolation region is partially removed adjacent to the active device region to define the trench.
7. The method of claim 1 wherein the trench includes a sidewall that is inclined at an angle less than 90 degrees relative to a top surface of the substrate in the device active region, and the second isolation region is coextensive with the intrinsic base.
8. The method of claim 1 wherein the second isolation region extends to a shallower depth relative to a top surface of the substrate than the first isolation region.
9. The method of claim 3 wherein the substrate is comprised of a single crystal semiconductor material, and removing the portion of the substrate in the active device region comprises:
etching the substrate in the active device region with a wet chemical etchant that etches different crystallographic directions of the single crystal semiconductor material at different etch rates.
10. The method of claim 3 wherein at least partially filling the trench with the dielectric material to define the second isolation region comprises:
filling the lateral extension of the trench with the dielectric material.
11. The method of claim 10 wherein filling the lateral extension of the trench with the dielectric material comprises:
depositing the dielectric material using a conformal deposition technique.
12. The method of claim 11 wherein conformal deposition technique is low pressure chemical vapor phase deposition, and the dielectric material is comprised of an oxide of silicon.
13. The method of claim 3 wherein at least partially filling the trench with the dielectric material to define the second isolation region comprises:
closing the lateral extension of the trench with the dielectric material to define an air gap.
14. The method of claim 13 wherein the dielectric material and the air gap of the second isolation region have a composite dielectric constant that is less than a dielectric constant of a dielectric material comprising the first isolation region.
15. The method of claim 13 wherein the air gap is coextensive with the intrinsic base layer, the air gap is coextensive with the active device region of the substrate, and the air gap is coextensive with the second isolation region.
16. The method of claim 13 wherein filling the lateral extension of the trench with the dielectric material comprises:
depositing the dielectric material using a non-conformal deposition technique.
17. The method of claim 16 wherein conformal deposition technique is plasma-enhanced chemical vapor phase deposition, and the dielectric material is comprised of an oxide of silicon.