Semiconductor device and manufacturing method therefor
View Patent ↗A semiconductor electronic device structure includes an active area array disposed in a substrate, an isolation structure, a plurality of recessed gate structures, a plurality of word lines, and a plurality of bit lines. The active area array a plurality of active area columns and a plurality of active area rows, defining an array of active areas. The substrate has two recesses formed at the central region thereof. Each recessed gate structure is respectively disposed in the recess. A protruding structure is formed on the substrate in each recess. A STI structure of the isolation structure is arranged between each pair of adjacent active area rows. Word lines are disposed in the substrate, each electrically connecting the gate structures there-under. Bit lines are disposed above the active areas, forming a crossing pattern with the word lines.
1. A semiconductor electronic device structure, comprising:
a substrate having an active area array disposed therein, the active area array including a plurality of crossingly arranged active area columns and active area rows, defining a plurality of active areas,
wherein the central region of each active area has a pair of recesses disposed therein,
wherein the bottom portion of each recess is formed with a protruding structure protruding from a bottom surface thereof,
wherein a first doped area is formed between the pair of recesses in the central region of each active area,
wherein a second doped area is respectively formed on the opposite ends of the central region in each active area;
an insulation structure formed in the substrate, comprising a plurality of shallow trench isolation structures correspondingly arranged between each pair of adjacent active area rows;
a plurality of recessed gate structures respectively formed in each recess;
a plurality of word lines embeddedly disposed in the substrate along the direction of the active area columns in electrical connection with a plurality of recessed gate structures in the corresponding active area columns underneath; and
a plurality of bit lines disposed above the active area correspondingly in electrical connection with a first doped area in each of the active area rows and forming a crossing pattern with the word lines.
2. The semiconductor electronic device structure of claim 1 , wherein the word lines and the bit lines cross at a non-ninety degree angle.
3. The semiconductor electronic device structure of claim 2 , wherein each pair of neighboring active areas in the adjacent active area rows is arranged in a separately offset manner by an offset distance of substantially twice the width of the word line.
4. The semiconductor electronic device structure of claim 1 , wherein a cross-sectional shape of the protruding structure resembles the shape of a fin.
5. The semiconductor electronic device structure of claim 1 , wherein the recessed gate structure comprises a barrier structure respectively formed on the side-wall in the recess to selectively cover the portion of the side wall that comprises the substrate and the shallow trench isolation structure.
6. A fabrication method of a semiconductor electronic device structure, comprising steps of:
providing a substrate having an active area array disposed therein,
wherein the active area array includes a plurality of crossingly arranged active area columns and active area rows defining a plurality of active areas;
forming an insulation structure in the substrate,
wherein the insulation structure comprises a plurality of shallow trench isolation structures correspondingly arranged between each pair of adjacent active area rows;
etching the central region of each active area to form a pair of recesses
wherein the bottom portion of each recess is formed with a protruding structure protruding from the bottom surface in the recess;
forming a recessed gate structure in each of the recesses;
in each of the active areas,
forming a first doped area between the pair of recesses, and
forming a second doped area respectively at the opposite ends of the central region thereof.
7. The fabrication method of a semiconductor electronic device structure of claim 6 , wherein a cross-sectional shape of the protruding structure resembles the shape of a fin.
8. The fabrication method of a semiconductor electronic device structure of claim 6 , wherein the forming of recessed gate structure comprises the steps of:
in each of the recesses,
forming a barrier structure on the side-wall therein to selectively cover the portion of the side wall that comprises the substrate and the shallow trench isolation structure,
forming an etched space therein by etching the substrate at the bottom portion of the recess, and
partially etching the shallow trench isolation structure located at the two respective lateral sides of the recess.
9. The fabrication method of a semiconductor electronic device structure of claim 8 , further comprising the steps of:
reducing the width of the protruding structure by partially etching the substrate in the bottom region of each recess.
10. The fabrication method of a semiconductor electronic device structure of claim 8 ,
wherein the forming an insulation structure comprises the steps of:
respectively forming trenches at both sides of a recess in the substrate, and
sequentially disposing an oxide liner, a silicon nitride liner, a spin-on dielectric layer, and a high-density plasma layer into the trenches; and
wherein the partial etching step of the shallow trench isolation structure comprises:
partially etching the oxide liner of the shallow trench isolation structure located at the two respective lateral sides of the recess in the substrate.