Via structure in multi-layer substrate
Disclosed is a via structure in a multi-layer substrate, comprising a first metal layer, a dielectric layer and a second metal layer. The first metal layer has an upper surface. The dielectric layer covers the first metal layer in which a via is opened to expose the upper surface. The second metal layer is formed in the via and contacts an upper surface and an inclined wall of the via. A contacting surface of the second metal layer has a top line lower than the upper edge of the inclined wall. Alternatively, the second metal layer can be formed on the dielectric layer as being a metal line simultaneously as formed in the via as being a pad. The metal line and the pad are connected electronically. The aforesaid metal second layer can be formed in the via and on the dielectric layer by a metal lift-off process.
1. A via structure in a multi-layer substrate, comprising:
a first metal layer, having an upper surface;
a dielectric layer, covering the first metal layer in which a via is opened to expose the upper surface and the via has an inclined wall with an upper edge; and
a second metal layer, formed in the via and contacting the upper surface, the inclined wall, wherein a contacting surface of the second metal layer has a top line lower than the upper edge of the inclined wall and an acute angle formed by the upper surface of the first metal layer and the inclined wall is smaller than 75° and the multi-layer substrate is flexible, wherein the via structure can be maintained complete as being bent in bendable areas of the multi-layer substrate,
wherein the second metal layer is completely formed in the via and formed on a part of the inclined wall.
2. The via structure of claim 1 , wherein the top line of the contacting surface is higher than a lower edge of the inclined wall.
3. The via structure of claim 1 , wherein the second metal layer is further formed above the dielectric layer employed as being a metal line and the second metal layer in the via is employed as being a pad, wherein the metal line and the pad are formed at the same time.
4. The via structure of claim 1 , wherein an area formed by a lower edge of the inclined wall is smaller than an area formed by the upper edge.
5. The via structure of claim 1 , wherein a material of the dielectric layer is polyimide.
6. A via structure in a multi-layer substrate, comprising:
a first metal layer, having an upper surface;
a dielectric layer, covering the first metal layer in which a via is opened to expose the upper surface and the via has an inclined wall with an upper edge; and
a second metal layer, formed in the via as being a pad and formed on the dielectric layer as being a metal line, wherein the second metal layer as being the pad contacts the upper surface, the inclined wall and a contacting surface of the pad has a top line lower than the upper edge of the inclined wall and an acute angle formed by the upper surface of the first metal layer and the inclined wall is smaller than 75° and the multi-layer substrate is flexible, wherein the via structure can be maintained complete as being bent in bendable areas of the multi-layer substrate,
wherein the second metal layer is completely formed in the via and formed on a part of the inclined wall.
7. The via structure of claim 6 , wherein the top line of the contacting surface is higher than a lower edge of the inclined wall.
8. The via structure of claim 6 , wherein an area formed by a lower edge of the inclined wall is smaller than an area formed by the upper edge.
9. The via structure of claim 6 , wherein a material of the dielectric layer is polyimide.