IP Library › Granted Patent US 9,269,695
Granted Patent B2
US 9,269,695 · App. 14/553,637 · Granted Feb 23, 2016

Semiconductor device assemblies including face-to-face semiconductor dice and related methods

Inventors: Eric Tan Swee Seng (Singapore, SG); Lee Choon Kuan (Singapore, SG)
Assignee: Micron Technology, Inc.
H01L25/0657H01L21/44H01L24/48H01L25/50H01L25/18H01L2224/0401H01L2224/06135H01L2224/06136H01L2224/16145H01L2224/32145H01L2224/32225H01L2224/4824H01L2224/48221H01L2224/4943H01L2224/73215H01L2224/73265H01L2225/0651H01L2225/06513H01L2225/06575H01L2225/06579H01L2924/01078H01L2924/01079H01L2924/01087H01L2924/14H01L2924/15311
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Quick Facts
Patent No.
US 9,269,695
App. No.
14/553,637
Granted
Feb 23, 2016
Kind
B2
Abstract

Methods of manufacturing semiconductor device assemblies include attaching a back side of a first semiconductor die to a substrate and structurally and electrically coupling a first end of laterally extending conductive elements to conductive terminals on or in a surface of the substrate. Second ends of the laterally extending conductive elements are structurally and electrically coupled to bond pads on or in an active surface of the first semiconductor die. Conductive structures are structurally and electrically coupled to bond pads of a second semiconductor die. At least some of the conductive structures are aligned with at least some of the bond pads of the first semiconductor die. An active surface of the second semiconductor die faces an active surface of the first semiconductor die. At least some of the conductive structures are structurally and electrically coupled to at least some of the bond pads of the first semiconductor die.

Claims (30)

1. A semiconductor device assembly, comprising:

a plurality of vertically stacked discrete dielectric structures disposed between an active surface of a first semiconductor die and an active surface of a second semiconductor die, the active surface of the first semiconductor die facing the active surface of the second semiconductor die; and

a plurality of laterally extending conductive elements, a first end of each laterally extending conductive element being structurally and electrically coupled to a conductive terminal of a substrate; a second end of each laterally extending conductive element being structurally and electrically coupled to at least one of a bond pad of the first semiconductor die, a bond pad of the second semiconductor die, and a conductive structure electrically and structurally coupled to a bond pad of the first semiconductor die and a bond pad of the second semiconductor die;

wherein an intermediate portion of each laterally extending conductive element is disposed between and in contact with at least two of the plurality of vertically stacked discrete dielectric structures.

2. The semiconductor device assembly of claim 1 , wherein each laterally extending conductive element of the plurality comprises a bond wire.

3. The semiconductor device assembly of claim 1 , wherein each laterally extending conductive element of the plurality is disposed adjacent and in contact with a flexible dielectric substrate.

4. The semiconductor device assembly of claim 1 , wherein at least a portion of at least one laterally extending conductive element passes through at least one of the plurality of vertically stacked discrete dielectric structures.

5. The semiconductor device assembly of claim 1 , wherein the active surface of the first semiconductor die comprises a plurality of bond pads disposed in a pattern.

6. The semiconductor device assembly of claim 5 , wherein the active surface of the second semiconductor die comprises a plurality of bond pads disposed in a mirror-image pattern to the pattern of the bond pads of the first semiconductor die.

7. The semiconductor device assembly of claim 1 , wherein at least one bond pad of the first semiconductor die is aligned with at least one bond pad of the second semiconductor die.

8. The semiconductor device assembly of claim 1 , further comprising:

a second plurality of vertically stacked discrete dielectric structures disposed between an active surface of a third semiconductor die and an active surface of a fourth semiconductor die, the active surface of the third semiconductor die facing the active surface of the fourth semiconductor die; and

a second plurality of laterally extending conductive elements, a first end of each laterally extending conductive element being structurally and electrically coupled to a conductive terminal of the substrate; a second end of each laterally extending conductive element of the second plurality being structurally and electrically coupled to at least one of a bond pad of the third semiconductor die, a bond pad of the fourth semiconductor die, and a conductive structure electrically and structurally coupled to a bond pad of the third semiconductor die and a bond pad of the fourth semiconductor die;

wherein an intermediate portion of each laterally extending conductive element of the second plurality of laterally extending conductive elements is disposed between and in contact with at least two of the second plurality of vertically stacked discrete dielectric structures.

9. The semiconductor device assembly of claim 1 , wherein the conductive structure electrically and structurally coupled to a bond pad of the first semiconductor die and a bond pad of the second semiconductor die comprises a material selected from the group consisting of gold, silver, platinum, copper, and alloys and mixtures thereof.

10. The semiconductor device assembly of claim 1 , wherein the conductive structure electrically and structurally coupled to a bond pad of the first semiconductor die and a bond pad of the second semiconductor die comprises a conductor-filled epoxy material.

11. The semiconductor device assembly of claim 1 , wherein at least one bond pad of the first semiconductor die is electrically isolated from all bond pads of the second semiconductor die.

12. The semiconductor device assembly of claim 1 , wherein the plurality of vertically stacked discrete dielectric structures separates the second semiconductor die from the first semiconductor die by a fixed, predetermined distance.

13. The semiconductor device assembly of claim 1 , wherein each vertically stacked discrete dielectric structure of the plurality is configured to support at least one of the plurality of laterally extending conductive elements between the first semiconductor die and the second semiconductor die.

14. The semiconductor device assembly of claim 1 , wherein each vertically stacked discrete dielectric structure of the plurality comprises a material selected from the group consisting of a thermoplastic resin and a thermoset polymer resin.

15. The semiconductor device assembly of claim 1 , further comprising an encapsulant material physically surrounding and electrically insulating the first semiconductor die and the second semiconductor die.

16. A method of forming a semiconductor device assembly, the method comprising:

structurally and electrically coupling a first end of each of a plurality of laterally extending conductive elements to a conductive terminal of a substrate;

structurally and electrically coupling a second end of each laterally extending conductive element to at least one of a bond pad of a first semiconductor die, a bond pad of a second semiconductor die, and a conductive structure electrically and structurally coupled to the bond pad of the first semiconductor die or the bond pad of the second semiconductor die;

disposing each laterally extending conductive element between and in contact with at least two of a plurality of discrete dielectric structures; and

vertically stacking the at least two of the plurality of discrete dielectric structures between an active surface of the first semiconductor die and an active surface of the second semiconductor die, wherein the active surface of the first semiconductor die faces the active surface of the second semiconductor die.

17. The method of claim 16 , further comprising electrically coupling the bond pad of the first semiconductor die to the bond pad of the second semiconductor die.

18. The method of claim 16 , wherein disposing each laterally extending conductive element between and in contact with at least two of a plurality of discrete dielectric structures comprises applying a plurality of discrete dielectric structures to the active surface of at least one of the first semiconductor die and the second semiconductor die at a wafer level.

19. The method of claim 16 , wherein disposing each laterally extending conductive element between and in contact with at least two of a plurality of discrete dielectric structures comprises providing a plurality of discrete dielectric structures each comprising at least one material selected from the group consisting of silicone, a silicone-based material, epoxy, and an epoxy-based material.

20. The method of claim 16 , wherein disposing each laterally extending conductive element between and in contact with at least two of a plurality of discrete dielectric structures comprises disposing each laterally extending conductive element between two discrete pieces of tape.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
Priority Claims (1)
SG 200601117-5 · Feb 20, 2006 · national
Continuity (3)
Continuation 13728456 · Dec 27, 2012
Division 11359985 · Feb 22, 2006
Related Publication 20150076679A1 · Mar 19, 2015