Interposed substrate and manufacturing method thereof
A manufacturing method of an interposed substrate is provided. A metal-stacked layer comprising a first metal layer, an etching stop layer and a second metal layer is formed. A patterned conductor layer is formed on the first metal layer, wherein the patterned conductor layer exposes a portion of the first metal layer. A plurality of conductive pillars is formed on the patterned conductor layer, wherein the conductive pillars are separated from each other and stacked on a portion of the patterned conductor layer. An insulating material layer is formed on the metal-stacked layer, wherein the insulating material layer covers the portion of the first metal layer and encapsulates the conductive pillars and the other portion of the patterned conductor layer. The metal-stacked layer is removed to expose a lower surface opposite to an upper surface of the insulating material layer and a bottom surface of the patterned conductor layer.
1. An interposed substrate comprising:
an insulating material layer having an upper surface and a lower surface opposite to each other, and a plurality of first through holes and a plurality of second through holes, wherein the first through holes and the second through holes penetrate through the insulating material layer, and a diameter of each of the first through holes is smaller than a diameter of each of the second through holes;
a plurality of conductive pillars respectively disposed within the first through holes of the insulating material layer, wherein each conductive pillar has a top surface and a bottom surface opposite to each other, and the top surface of each conductive pillar and the upper surface of the insulating material layer are coplanar;
a patterned conductor layer disposed within the second through holes of the insulating material layer, wherein the conductive pillars are separated from each other and stacked on the patterned conductor layer, and a bottom surface of the patterned conductor layer and the lower surface of the insulating material layer are not aligned; and
a dielectric layer disposed on the upper surface of the insulating material layer, wherein the dielectric layer directly covers the upper surface of the insulating material layer and the top surfaces of the conductive pillars.
2. The interposed substrate as recited in claim 1 , wherein an orthogonal projection area of each of the conductive pillars on an upper surface opposite to the bottom surface of the patterned conductor layer is overlapped with and smaller than a surface area of the upper surface of the patterned conductor layer.
3. The interposed substrate as recited in claim 1 further comprising:
a plurality of conductive through vias penetrating through the dielectric layer and respectively connecting the top surfaces of the conductive pillars; and
a plurality of pads disposed on the dielectric layer and connecting the conductive through vias, wherein the pads electrically connect with the conductive pillars through the conductive through vias, and the pads and the conductive through vias define a redistribution layer.
4. The interposed substrate as recited in claim 3 , wherein an orthogonal projection area of each of the pads on an upper surface of the dielectric layer is overlapped with and greater than an orthogonal projection area of each of the conductive pillars on the upper surface of the dielectric layer.
5. The interposed substrate as recited in claim 3 , wherein a thickness of the dielectric layer is smaller than a thickness of the insulating material.
6. The interposed substrate as recited in claim 1 , wherein a material of the conductive pillars comprises copper, nickel or gold.
7. The interposed substrate as recited in claim 1 , wherein a material of the patterned conductor layer comprises copper, nickel or gold.