Attaching device and attaching method
An attaching device configured to attach a substrate and a support via an adhesive layer is provided with support holding members. Holding tools of the support holding members are configured to hold the support with oblique surface parts (contact members) of the holding tools without coming into contact with a surface of the support, which is to be attached to the substrate. The attaching device attaches, to the substrate, the support of which the surface is held not to be contacted.
1. An attaching device configured to attach a substrate and a support configured to support the substrate via an adhesive layer, the attaching device comprising:
a stage configured to have the substrate placed thereon;
a support holder configured to hold the support without coming into contact with a surface of the support that is to be attached to the substrate via the adhesive layer;
a horizontal adjuster configured to horizontally align the surface of the support to be attached to the substrate with the substrate;
a lift configured to vertically move the support holder so as to bring the support toward or away from the substrate; and
a reversal mechanism configured to reverse upper and lower surfaces of the support.
2. The attaching device according to claim 1 , wherein the support holder is configured to hold an end portion of the support upon carrying-in of the support.
3. The attaching device according to claim 1 , wherein the reversal mechanism is configured to reverse the support after positioning of the support is performed.
4. The attaching device according to claim 1 , wherein the support holder doubles as the reversal mechanism.
5. The attaching device according to claim 2 , wherein the support holder has a holding tool having an oblique surface part, the holding tool being configured to hold the support with the oblique surface part without coming into contact with at least the surface of the support.
6. The attaching device according to claim 2 , wherein the support holder has a hoe-shaped holding tool having an oblique surface part and an inverted oblique surface part arranged at a perpendicular upper part to the oblique surface part.
7. A method of attaching a substrate and a support configured to support the substrate via an adhesive layer, the method comprising:
placing the substrate on a stage;
holding the support without coming into contact with a surface of the support that is to be attached to the substrate via the adhesive layer using a support holder;
horizontally aligning the surface of the support to be attached to the substrate with the substrate using a horizontal adjuster;
vertically moving the support holder so as to bring the support toward or away from the substrate using a lift; and
reversing upper and lower surfaces of the support using a reversal mechanism.
8. The method according to claim 7 , further comprising positioning the support.
9. The method according to claim 7 , further comprising holding an end portion of the support upon carrying-in of the support, before holding the support.
10. The method according to claim 7 , further comprising positioning the support, wherein the reversing is performed after the support positioning.
11. The method according to claim 7 , further comprising positioning the substrate.
12. The method according to claim 11 , further comprising holding an end portion of the support upon carrying-in of the support, before holding the support, wherein the substrate positioning is performed before the support carrying-in.