Semiconductor device with a low-K spacer and method of forming the same
A device includes a semiconductor substrate. A gate stack on the semiconductor substrate includes a gate dielectric layer and a gate conductor layer. Low-k spacers are adjacent to the gate dielectric layer. Raised source/drain (RSD) regions are adjacent to the low-k spacers. The low-k spacers are embedded in an ILD on the RSD regions.
1. A device, comprising:
a semiconductor substrate;
a gate stack on the semiconductor substrate, the gate stack including a gate conductor layer and a gate dielectric layer under the gate conductor directly on the semiconductor substrate and on sidewalls of the gate conductor layer;
low-k spacers adjacent to the gate dielectric layer;
raised source/drain (RSD) regions adjacent to the low-k spacers;
an ILD layer on the RSD regions and the low-k spacers, wherein the ILD layer overhangs the low-k spacers; and
spacers between the gate dielectric layer and the low-k spacers and between the ILD layer and the gate dielectric layer above the low-k spacers.
2. The device according to claim 1 , wherein the semiconductor substrate comprises a semiconductor-on-insulator (SOI) substrate having an ETSOI layer, a BOX layer and a substrate layer.
3. The device according to claim 2 , wherein the ETSOI layer has a thickness in a range from about 3 nm to about 10 nm.
4. The device according to claim 1 , wherein the gate dielectric layer comprises a high-k material.
5. The device according to claim 4 , wherein the high-k material is selected from the group consisting of hafnium oxide, hafnium silicon oxide, hafnium silicon oxynitride, lanthanum oxide, lanthanum aluminum oxide, zirconium oxide, zirconium silicon oxide, zirconium silicon oxynitride, tantalum oxide, titanium oxide, barium strontium titanium oxide, barium titanium oxide, strontium titanium oxide, yttrium oxide, aluminum oxide, lead scandium tantalum oxide and lead zinc niobate.
6. The device according to claim 1 , wherein the gate conductor layer comprises a metal.
7. The device according to claim 6 , wherein the metal is selected from the group consisting of:
tungsten, titanium, tantalum, ruthenium, zirconium, cobalt, copper, aluminum, lead, platinum, tin, silver and gold.
8. The device according to claim 1 , wherein the spacers are thin nitride spacers having a width in a range from about 2 nm to about 6 nm.
9. The structure of claim 1 , wherein the wherein the ILD layer overhangs the low-k spacers, directly contacting an upper portion of the low-k spacers and the spacers above the low-k spacers.
10. A method in a computer-aided design system for generating a functional design model of a semiconductor device, the method comprising:
generating a functional representation of a gate stack on the semiconductor substrate, the gate stack including a gate conductor layer and a gate dielectric layer under the gate conductor directly on the semiconductor substrate and on sidewalls of the gate conductor layer;
generating a functional representation of low-k spacers adjacent to the gate dielectric layer;
generating a functional representation of raised source/drain (RSD) regions adjacent to the low-k spacers;
generating a functional representation of an ILD layer on the RSD regions and the low-k spacers, wherein the ILD layer overhangs the low-k spacers;
generating a functional representation of spacers between the gate dielectric layer and the low-k spacers and between the ILD layer and the gate dielectric layer above the low-k spacers and
manufacturing the semiconductor device using the generated functional representations.
11. The method according to claim 10 , wherein the semiconductor substrate comprises a semiconductor-on-insulator (SOI) substrate having an ETSOI layer, a BOX layer and a substrate layer.
12. The method according to claim 11 , wherein the ETSOI layer has a thickness in a range from about 3 nm to about 10 nm.
13. The method according to claim 10 , wherein the gate dielectric layer comprises a high-k material.
14. The method according to claim 13 , wherein the high-k material is selected from the group consisting of:
hafnium oxide, hafnium silicon oxide, hafnium silicon oxynitride, lanthanum oxide, lanthanum aluminum oxide, zirconium oxide, zirconium silicon oxide, zirconium silicon oxynitride, tantalum oxide, titanium oxide, barium strontium titanium oxide, barium titanium oxide, strontium titanium oxide, yttrium oxide, aluminum oxide, lead scandium tantalum oxide and lead zinc niobate.
15. The method according to claim 10 , wherein the gate conductor layer comprises a metal.
16. The method according to claim 15 , wherein the metal is selected from the group consisting of:
tungsten, titanium, tantalum, ruthenium, zirconium, cobalt, copper, aluminum, lead, platinum, tin, silver and gold.
17. The method according to claim 10 , wherein the functional design model is synthesized into a netlist.
18. The method according to claim 10 , wherein the spacers are nitride spacers having a width in a range from about 2 nm to about 6 nm.