Integrated circuit product with bulk and SOI semiconductor devices
An integrated circuit product is disclosed including an SOI structure including a bulk semiconductor substrate, a buried insulation layer positioned on the bulk semiconductor substrate and a semiconductor layer positioned on the insulation layer, wherein, in a first region of the SOI structure, the semiconductor layer and the buried insulation layer are removed and, in a second region of the SOI structure, the semiconductor layer and the buried insulation layer are present above the bulk semiconductor substrate. The product further includes a semiconductor bulk device comprising a first gate structure positioned on the bulk semiconductor substrate in the first region and an SOI semiconductor device comprising a second gate structure positioned on the semiconductor layer in the second region, wherein the first and second gate structures have a final gate height substantially extending to a common height level above an upper surface of the bulk semiconductor substrate.
1. An integrated circuit product, comprising:
an SOI structure comprising:
a bulk semiconductor substrate;
a buried insulation layer positioned on said bulk semiconductor substrate; and
a semiconductor layer positioned on said buried insulation layer, wherein, in a first region of said SOI structure, said semiconductor layer and said buried insulation layer are removed and, in a second region of said SOI structure, said semiconductor layer and said buried insulation layer are present above said bulk semiconductor substrate;
a semiconductor bulk device comprising a first gate structure positioned on said bulk semiconductor substrate in said first region; and
an SOI semiconductor device comprising a second gate structure positioned on said semiconductor layer in said second region, wherein said first and second gate structures have a final gate height substantially extending to a common height level above an upper surface of said bulk semiconductor substrate.
2. The product of claim 1 , wherein said first and second gate structures comprise aluminum.
3. The product of claim 1 , further comprising raised source/drain regions in said first and second regions adjacent said first and second gate structures, said raised source/drain regions being formed from doped silicon material disposed on said bulk semiconductor substrate in said first region and on said semiconductor layer in said second region.
4. The product of claim 1 , wherein said buried insulation layer comprises silicon dioxide, said bulk semiconductor layer comprises silicon and said semiconductor layer comprises silicon.
5. The product of claim 1 , wherein said semiconductor bulk device is a transistor and said SOI semiconductor device is a transistor.
6. An integrated circuit product, comprising:
an SOI structure comprising:
a bulk semiconductor substrate;
a buried insulation layer positioned on said bulk semiconductor substrate; and
a semiconductor layer positioned on said buried insulation layer, wherein, in a first region of said SOI structure, said semiconductor layer and said buried insulation layer are removed and, in a second region of said SOI structure, said semiconductor layer and said buried insulation layer are present above said bulk semiconductor substrate;
a resistor device positioned on said bulk semiconductor substrate in said first region, said resistor device being formed by a resistor material; and
an SOI semiconductor device comprising a gate structure positioned on said semiconductor layer in said second region, wherein an upper surface of said resistor material and an upper surface of said gate structure substantially extend to a common level above an upper surface of said bulk semiconductor substrate.
7. The product of claim 6 , wherein said SOI semiconductor device is a transistor.
8. An integrated circuit product, comprising:
an SOI structure comprising:
a bulk semiconductor substrate;
a buried insulation layer positioned on said bulk semiconductor substrate; and
a semiconductor layer positioned on said buried insulation layer, wherein, in a first region of said SOI structure, said semiconductor layer and said buried insulation layer are removed and, in a second region of said SOI structure, said semiconductor layer and said buried insulation layer are present above said bulk semiconductor substrate;
a capacitor device with a capacitor material positioned on said semiconductor substrate in said first region; and
an SOI semiconductor device comprising a gate structure positioned on said semiconductor layer in said second region, wherein an upper surface of said capacitor material and an upper surface of said gate structure substantially extend to a common height level above an upper surface of said bulk semiconductor substrate.
9. The product of claim 8 , wherein said buried insulation layer comprises silicon dioxide, said bulk semiconductor layer comprises silicon and said semiconductor layer comprises silicon.
10. The product of claim 9 , wherein said SOI semiconductor device is a transistor.