IP Library › Granted Patent US 9,664,888
Granted Patent B2
US 9,664,888 · App. 14/691,885 · Granted May 30, 2017

Multi-surface optical 3D microscope

Inventors: Ken Kinsun Lee (Los Altos, CA); Ronny Soetaman (Fremont, CA); Zhen Hou (Fremont, CA); James Jianguo Xu (San Jose, CA); Rusmin Kudinar (Fremont, CA); Vamsi Mohan Velidandla (San Jose, CA); Ben Garland (Livermore, CA)
Assignee: Zeta Instruments, Inc.
G02B21/365G02B21/0016G02B21/367G06K9/46G06T5/00G06T7/40H04N5/357G06T2207/10056
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Quick Facts
Patent No.
US 9,664,888
App. No.
14/691,885
Granted
May 30, 2017
Kind
B2
Abstract

A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.

Claims (26)

1. A method of displaying multiple surfaces of an object, the method comprising:

extracting multiple surfaces of the object from a plurality of 2 dimensional images collected at a corresponding plurality of scan positions;

independently controlling a rendered opacity of each of the multiple surfaces of the object; and

separating real surface data associated with each of the multiple surfaces from noise data associated with each of the multiple surfaces during rendering of each of the multiple surfaces.

2. The method of claim 1 , wherein the rendered opacity of each of the multiple surfaces is determined by a corresponding opacity parameter selected by an operator using a corresponding interactive software slider bar.

3. The method of claim 1 , wherein the separating associated with each of the multiple surfaces is determined by a corresponding filter selected by an operator using a corresponding interactive software slider bar.

4. The method of claim 3 , wherein each corresponding filter is based on one of an image contrast and an image intensity.

5. The method of claim 1 , wherein the 2D images comprise image contrast values, wherein contrast is used as a measure of confidence in determining valid surface data points of each of the multiple surfaces.

6. The method of claim 1 , wherein the 2D images comprise image intensity values, wherein intensity is used as a measure of confidence in determining a valid surface data points of each of the multiple surfaces.

7. The method of claim 1 , further comprising rendering each of the multiple surfaces with an adjustable opacity, whereby each of the multiple surfaces is seen, highlighted or hidden.

8. The method of claim 7 , further comprising adjusting the opacity of each of the rendered multiple surfaces interactively.

9. The method of claim 1 , wherein at least one of the multiple surfaces only covers a portion of an image area.

10. The method of claim 1 , wherein the separating associated with each of the multiple surfaces is determined by a corresponding filter selected by an operator, wherein the operator interactively sets each filter while watching the corresponding surface being rendered.

11. The method of claim 10 , further comprising determining a rendering area associated with each of the multiple surfaces by selecting the corresponding filter.

12. An imaging system for displaying multiple surfaces of an object, the imaging system comprising:

means for extracting multiple surfaces of the object from a plurality of 2 dimensional images collected at a corresponding plurality of scan positions;

means for independently controlling a rendered opacity of each of the multiple surfaces of the object; and

a filter for separating real surface data associated with each of the multiple surfaces from noise data associated with each of the multiple surfaces during rendering of each of the multiple surfaces.

13. The imaging system of claim 12 , wherein the 2D images comprise image contrast values, wherein the filter uses contrast as a measure of confidence in determining valid surface data points of each of the multiple surfaces.

14. The imaging system of claim 12 , wherein the 2D images comprise image intensity values, wherein the filter uses intensity as a measure of confidence in determining a valid surface data points of each of the multiple surfaces.

15. The imaging system of claim 12 , wherein at least one of the multiple surfaces only covers a portion of an image area.

16. The imaging system of claim 12 , wherein the filter is adjustable to determine a rendering area associated with each of the multiple surfaces.

17. The imaging system of claim 12 , further comprising interactive software slider bars, each associated with a corresponding one of the multiple surfaces, wherein each interactive software slider bar specifies an opacity parameter that controls a rendered opacity of the corresponding one of the multiple surfaces.

18. The imaging system of claim 12 , further comprising interactive software slider bars, each associated with a corresponding one of the multiple surfaces, wherein each interactive software slider bar specifies a filter associated with the corresponding one of the multiple surfaces.

19. The imaging system of claim 18 , wherein each filter is based on one of an image contrast and an image intensity.

20. The imaging system of claim 12 , further comprising means for adjusting the opacity of each of the rendered multiple surfaces interactively.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 1, 2018
From: ZETA INSTRUMENTS, INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 046530/0323 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 27, 2015
From: LEE, KEN KINSUN; SOETARMAN, RONNY; HOU, ZHEN; XU, JAMES JIANGUO; KUDINAR, RUSMIN; VELIDANDLA, VAMSI MOHAN; GARLAND, BEN
To: ZETA INSTRUMENTS, INC.
Reel/Frame 035508/0199 →
Continuity (3)
Continuation 13220595 · Aug 29, 2011
Provisional Application 61378794 · Aug 31, 2010
Related Publication 20150226952A1 · Aug 13, 2015