Barrier structures for underfill blockout regions
The disclosure relates to semiconductor structures and, more particularly, to barrier structures for underfill blockout regions uses in phonotics chip packaging and methods of manufacture. The structure includes a substrate with a plurality of solder connections and at least one optical fiber interface disposed within at least one cavity of the substrate. The structure further includes a barrier structure formed about the cavity which is structured to prevent underfill material from degrading an optical coupling of the optical fiber.
1. A structure, comprising:
a substrate with a plurality of solder connections;
at least one optical fiber disposed within at least one cavity of the substrate; and
a barrier structure formed about and surrounding an entirety of the cavity and which is structured to prevent underfill material from degrading an optical coupling of the optical fiber,
wherein the barrier structure extends partially between facing surfaces of the substrate and an interposer joined to the substrate, leaving a space between the barrier structure and the interposer, and the cavity is filled with an optical epoxy.
2. The structure of claim 1 , wherein the substrate is a photonics chip comprising a waveguide structure extending into the at least one cavity and optically coupled to the at least one optical fiber, and the solder connections couple the photonics chip to an interposer.
3. The structure of claim 2 , wherein the barrier structure is structured to prevent the underfill material from entering the at least one cavity wherein the at least one optical fiber is optically coupled to the waveguide structure.
4. The structure of claim 3 , wherein the barrier structure is composed of connected solder connections.
5. The structure of claim 3 , wherein the barrier structure is composed of polymer material.
6. The structure of claim 1 , wherein the at least one cavity is devoid of solder balls.
7. The structure of claim 1 , wherein:
the at least one cavity is two cavities and the at least one optical fiber is two optical fibers;
each of the two optical fibers extend within separate ones of the two cavities; and
the barrier structure is two barrier structures, each of which surround a separate cavity of the two cavities.
8. A structure, comprising:
a photonics chip mounted to an interposer with a plurality of solder connections;
at least one cavity formed in a substrate of the photonics chip;
a waveguide structure extending into the at least one cavity;
an optical fiber coupled to the waveguide structure within the at least one cavity; and
a barrier structure formed about a region which the optical fiber is coupled to the waveguide structure so that the barrier structure is positioned within an area of the photonics chip and an area of the interposer,
wherein the barrier structure extends partially between facing surfaces of the photonics chip and the interposer, leaving a space between the barrier structure and the interposer, and the at least one cavity is filled with an optical epoxy.
9. The structure of claim 8 , wherein the barrier structure is formed from connected solder connections.
10. The structure of claim 8 , wherein the barrier structure is formed from polymer material.
11. The structure of claim 8 , wherein the space is dimensioned to prevent underfill from entering the region which the optical fiber is coupled to the waveguide structure.
12. The structure of claim 8 , wherein the space is dimensioned to prevent underfill from entering the cavity where the optical fiber is coupled to the waveguide structure.
13. The structure of claim 1 , wherein the cavity is a V-shaped groove with a flattened surface.
14. The structure of claim 13 , wherein the barrier structure is made of solder material which includes a barrier material of TiN followed by a seed layer of a low resistance conductive layer used during back end of the line (BEOL) processes.
15. The structure of claim 14 , wherein the barrier structure is further structured to allow the at least one optical fiber to be inserted into the cavity while still allowing the optical epoxy to fill remaining portions of the cavity and the underfill material to provide mechanical stability.