IP Library › Granted Patent US 10,008,664
Granted Patent B2
US 10,008,664 · App. 15/063,238 · Granted Jun 26, 2018

Phase change memory cell with constriction structure

Inventors: Jun Liu (Boise, ID); Michael P. Violette (Boise, ID)
Assignee: Micron Technology, Inc.
H01L45/06H01L45/1233H01L45/1246H01L45/1253H01L45/143H01L45/144H01L45/148H01L45/1608H01L45/1675H01L45/1683
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Quick Facts
Patent No.
US 10,008,664
App. No.
15/063,238
Granted
Jun 26, 2018
Kind
B2
Abstract

Some embodiments include methods of forming memory cells. Such methods can include forming a first electrode, a second electrode, and a memory element directly contacting the first and second electrodes. Forming the memory element can include forming a programmable portion of the memory element isolated from the first electrode by a first portion of the memory element and isolated from the second electrode by a second portion of the memory element. Other embodiments are described.

Claims (22)

1. A device comprising:

a first electrode and a second electrode;

a memory element directly contacting the first and second electrodes, the memory element including a programmable portion having a material configured to change between multiple phases to store information based on a resistance state of an amorphous region of the programmable portion, wherein the programmable portion is isolated from the first electrode by a first portion of the memory element, and wherein the programmable portion is isolated from the second electrode by a second portion of the memory element, and the resistance state is based on a size of the amorphous region; and wherein

the first portion of the memory element includes a tapered part and a larger part, the larger part is between the tapered part and the first electrode, and the programmable portion includes at least a part of the tapered part;

the second portion of the memory element includes a first part and a second part, the first part contacts the second electrode, the second part is between the first part and the tapered part, wherein the first part and the second part have a same width, and the width is measured in a direction perpendicular to a direction from the first electrode to the second electrode; and

the programmable portion having the material configured to change between multiple phases includes a portion of the tapper part and a portion of the second part.

2. The device of claim 1 , wherein the memory element is configured to cause the material of the programmable portion to have a first phase of the multiple phases and to cause a material of each of the first and second portions to have a second phase of the multiple phases.

3. The device of claim 2 , wherein the material of programmable portion and the material at each of the first and second portion include chalcogenide material.

4. The device of claim 1 , wherein a material of each of the first and second portion has a crystalline phase.

5. The device of claim 1 , wherein the programmable portion is configured to store information representing multiple bits.

6. The device of claim 1 , wherein the memory element is configured to cause the size of the amorphous region to have a first thickness corresponding to a first value of the resistance state, and a second thickness corresponding to a second value of the resistance state.

7. The device of claim 6 , wherein the memory element is configured to cause the size of the amorphous region to have a third thickness corresponding to a third value of the resistance state.

8. The device of claim 1 , wherein the memory element is configured to cause the size of the amorphous region to have a first thickness corresponding to a first value of information stored in the memory element, and a second thickness corresponding to a second value of information stored in the memory element.

9. The device of claim 8 , wherein the memory element is configured to cause the size of the amorphous region to have a third thickness corresponding to a third first value of information stored in the memory element.

10. The device of claim 1 , wherein the first portion includes a first cross-section area to pass a first current, the second portion includes a second cross-section area to pass a second current, and the programmable portion includes a third cross-section to pass a third current, and the third cross-section area is smaller than each of the first and second cross-section areas.

11. The device of claim 1 , wherein the programmable portion includes chalcogenide material.

12. The device of claim 1 , wherein the material includes a compound of germanium, antimony, and tellurium.

13. The device of claim 1 , further comprising an access component coupled to the memory element.

14. The device of claim 13 , wherein one of the access component and the memory element is coupled to a wordline, and the other one of the access component and the memory element is coupled to a bit line.

15. The device of claim 13 , wherein the access component includes a field-effect transistor coupled to a wordline, and the memory element is coupled to a bit line.

16. The device of claim 13 , wherein the access component includes a bipolar junction transistor coupled to a wordline, and the memory element is coupled to a bit line.

17. The device of claim 13 , wherein the access component includes a diode coupled to a wordline, and the memory element is coupled to a bit line.

Continuity (4)
Continuation 14458804 · Aug 13, 2014
Division 12950827 · Nov 19, 2010
Division 12049056 · Mar 14, 2008
Related Publication 20160190438A1 · Jun 30, 2016