Multiple Fin heights with dielectric isolation
A method of forming semiconductor fins having different fin heights and which are dielectrically isolated from an underlying semiconductor substrate. The fins may be formed by etching an active epitaxial layer that is disposed over the substrate. An intervening sacrificial epitaxial layer may be used to template growth of the active epitaxial layer, and is then removed and backfilled with an isolation dielectric layer. The isolation dielectric layer may be disposed between bottom surfaces of the fins and the substrate, and may be deposited, for example, following the etching process used to define the fins. Within different regions of the substrate, dielectrically isolated fins of different heights may have substantially co-planar top surfaces.
1. A method of forming a structure, comprising:
depositing a first epitaxial layer on a semiconductor substrate;
depositing a second epitaxial layer on the first epitaxial layer;
forming openings through the second epitaxial layer and the first epitaxial layer, wherein the openings extend into the semiconductor substrate;
depositing a dielectric layer within the openings;
forming a sidewall spacer layer over upper sidewall surfaces of the dielectric layer;
etching the second epitaxial layer using the sidewall spacer layer as an etch mask to form semiconductor fins each disposed over a respective sidewall surface of the dielectric layer;
removing the first epitaxial layer from under the fins; and
depositing an isolation layer under the fins.
2. The method of claim 1 , wherein the first epitaxial layer comprises silicon germanium and the second epitaxial layer comprises silicon.
3. The method of claim 1 , further comprising planarizing the second epitaxial layer prior to forming the openings.
4. The method of claim 1 , further comprising forming a capping layer over the second epitaxial layer prior to forming the openings.
5. The method of claim 4 , wherein forming the sidewall spacer layer comprises removing the capping layer to expose the upper sidewall surfaces of the dielectric layer.
6. The method of claim 1 , wherein the openings comprise parallel trenches.
7. The method of claim 1 , wherein the semiconductor substrate includes a raised region and a recessed region adjacent to the raised region, and the fins have a first height over the raised region and a second height greater than the first height over the recessed region.
8. The method of claim 7 , wherein top surfaces of the fins over the raised region are substantially coplanar with top surfaces of the fins over the recessed region.
9. The method of claim 1 , wherein the first epitaxial layer has a thickness of 5 to 20 nm.
10. The method of claim 1 , wherein the dielectric layer comprises silicon dioxide and the sidewall spacer layer comprises silicon nitride.