Supporting member separation method and supporting member separation apparatus
A supporting member separation method of separating a laminate formed by laminating a substrate, an adhesive layer, a release layer which is changed in quality by absorbing light, and a support plate in this order, the method including an irradiation step in which irradiation of laser light which is pulse-oscillated with a pulse having a pulse width of 20 ns or greater is performed to the release layer.
1. A supporting member separation method of separating a laminate formed by laminating a substrate, an adhesive layer, a release layer consisting of a fluorocarbon, wherein the fluorocarbon is film formed by a plasma chemical vapor deposition (CVD) method, and wherein the release layer loses, by absorbing light, strength or adhesiveness that the release layer has before being irradiated with light, and a supporting member in this order, the method comprising:
irradiating the release layer with laser light which (i) is pulse-oscillated with a pulse having a pulse width of 20 ns or greater and 108.5 ns or less, (ii) has a frequency of 20 kHz or greater and 100 kHz or less, and (iii) is pulse light having an irradiation rate of 4000 mm/s or greater and 10000 mm/s or less; and
separating the substrate and the release layer from each other by breaking the release layer through applying a external force to the release layer after the release layer is irradiated with the laser light.
2. The supporting member separation method according to claim 1 , wherein the supporting member is constituted to transmit the laser light, and wherein in the irradiation step, the laser light is irradiated on the laminate from the supporting member side.
3. The supporting member separation method according to claim 2 , wherein an electronic circuit is formed on a surface of the adhesive layer side of the substrate.
4. The supporting member separation method according to claim 1 , wherein the laser light is 20 kHz or greater and 60 kHz or less.
5. The supporting member separation method according to claim 1 , wherein a wavelength of light that can be absorbed by the release layer is in the range of 600 nm or less and, wherein an absorptivity of the light is 80%.
6. A supporting member separation apparatus for separating a laminate formed by laminating a substrate, an adhesive layer, a release layer consisting of a fluorocarbon, wherein the fluorocarbon is film-formed by a plasma chemical vapor deposition (CVD) method, and wherein the release layer loses, by absorbing light, strength or adhesiveness that the release layer has before being irradiated with light, and a supporting member in this order, the apparatus comprising:
a laser configured to irradiate the release layer with laser light which (i) is pulse-oscillated with a pulse having a pulse width of 20 ns or greater and 108.5 ns or less, (ii) has a frequency of 20 kHz or greater and 100 kHz or less, and (iii) is pulse light having an irradiation rate of 4000 mm/s or greater and 10000 mm/s or less, wherein the laser is selected from the group consisting of a YAG laser, a ruby laser, a glass laser, a YVO4 laser, an LD laser, a fiber laser, a dye laser, a CO2 laser, an excimer laser, an Ar laser, a He—Ne laser, a semiconductor laser, and a free electron laser; and
a separator configured to break the release layer through applying a external force to the release layer after the release layer is irradiated with the laser light, and thereby separate the substrate from the release layer.
7. The supporting member separation apparatus according to claim 6 , wherein the laser light is 20 kHz or greater and 60 kHz or less.
8. The supporting member separation apparatus according to claim 6 , wherein a wavelength of light that can be absorbed by the release layer is in the range of 600 nm or less and, wherein an absorptivity of the light is 80%.