Semiconductor device and method of manufacturing the same, and electronic apparatus
A semiconductor device is provided as a back-illuminated solid-state imaging device. The device is manufactured by bonding a first semiconductor wafer with a pixel array in a half-finished product state and a second semiconductor wafer with a logic circuit in a half-finished product state together, making the first semiconductor wafer into a thin film, electrically connecting the pixel array and the logic circuit, making the pixel array and the logic circuit into a finished product state, and dividing the first semiconductor wafer and the second semiconductor being bonded together into microchips.
1. An image sensor comprising:
a first semiconductor section including a first semiconductor substrate and a first multi-wiring layer, the first semiconductor substrate including a photodiode, and the first multi-wiring layer including a first insulating interlayer and first and second wirings; and
a second semiconductor section including a second semiconductor substrate and a second multi-wiring layer, the second semiconductor section including at least a part of a signal processing circuit, and the second multi-wiring layer including a second insulating interlayer and third and fourth wirings,
wherein,
the first semiconductor section and the second semiconductor section are bonded together such that the first multi-wiring layer and the second multi-wiring layer face each other,
the first wiring of the first multi-wiring layer directly contacts the third wiring of the second multi-wiring layer in a pixel region including the photodiode, and
the second wiring of the first multi-wiring layer directly contacts the fourth wiring of the second multi-wiring layer in a peripheral region other than the pixel region.
2. The image sensor according to claim 1 , wherein a part of the first insulating interlayer and a part of the second insulating interlayer are connected with each other.
3. The image sensor according to claim 1 , further comprising a light-shielding layer formed at a light incident side of the first semiconductor section in the peripheral region.
4. The image sensor according to claim 3 , wherein the light-shielding layer overlaps at least a part of the second wiring of the first multi-wiring layer and the fourth wiring of the second multi-wiring layer.
5. The image sensor according to claim 3 , wherein the light-shielding layer includes metal.
6. The image sensor according to claim 5 , wherein the metal is tungsten.
7. The image sensor according to claim 3 , wherein the light-shielding layer is electrically connected to the first semiconductor substrate.
8. The image sensor according to claim 7 , wherein the light-shielding layer is provided with a ground potential from the first semiconductor substrate.
9. The image sensor according to claim 7 , wherein a contact area where the light-shielding layer contacts the first semiconductor substrate overlaps a contact area where a portion of the second wiring of the first multi-wiring layer contacts a portion of the fourth wiring of the second multi-wiring layer in the peripheral region.
10. The image sensor according to claim 1 , wherein the first and the second multi-wiring layers include copper (Cu).
11. The image sensor according to claim 1 , further comprising at least one of a transfer transistor, a reset transistor, or an amplification transistor, in the first semiconductor section.
12. The image sensor according to claim 1 , further comprising an isolation region separating unit pixels of the pixel region from one another.
13. The image sensor according to claim 1 , wherein the photodiode generates a signal based on incident light, and the signal is transferred from the photodiode to the part of the signal processing circuit via the second wiring of the first multi-wiring layer and the fourth wiring of the second multi-wiring layer.
14. The image sensor according to claim 1 , further comprising an insulating layer formed at the light-incident side of the first semiconductor substrate.
15. The image sensor according to claim 14 , further comprising an on-chip lens and a color filter formed on the insulating layer and overlapping the pixel region.
16. The image sensor according to claim 15 , wherein a center line of the on-chip lens is offset from a center line of the photodiode.
17. The image sensor according to claim 1 , further comprising a connection portion on or above a surface of the second semiconductor substrate which is opposite to the first semiconductor section, wherein the connection portion is electrically connected to an external wiring.
18. The image sensor according to claim 17 , further comprising a connection conductor disposed in the peripheral region and penetrating through the second semiconductor substrate, wherein the connection conductor is coupled to a wiring in the second multi-wiring layer such that the wiring in the second multi-wiring layer is electrically connected to the external wiring.
19. The image sensor according to claim 1 , wherein the first wiring of the first multi-wiring layer and the second wiring of the first multi-wiring layer are part of a same wiring in the first multi-wiring layer, and wherein the third wiring of the second multi-wiring layer and the fourth wiring of the second multi-wiring layer are part of a same wiring in the second multi-wiring layer.
20. An electronic apparatus, comprising:
an imaging device including:
a first semiconductor section including a first semiconductor substrate and a first multi-wiring layer, the first semiconductor substrate including a photodiode, and the first multi-wiring layer including a first insulating interlayer and first and second wirings, and
a second semiconductor section including a second semiconductor substrate and a second multi-wiring layer, the second semiconductor section including at least a part of a signal processing circuit, and the second multi-wiring layer including a second insulating interlayer and third and fourth wirings,
wherein,
the first semiconductor section and the second semiconductor section are bonded together such that the first multi-wiring layer and the second multi-wiring layer face each other,
the first wiring of the first multi-wiring layer directly contacts the third wiring of the second multi-wiring layer in a pixel region including the photodiode, and
the second wiring of the first multi-wiring layer directly contacts the fourth wiring of the second multi-wiring layer in a peripheral region other than the pixel region; and
a lens configured to direct light to the light-incident side of the first semiconductor substrate.