Semiconductor device and manufacturing method of the same
A semiconductor device having stable electrical characteristics is provided. A semiconductor device that can be miniaturized or highly integrated is provided. One embodiment of the present invention includes a transistor including an oxide, a first barrier layer over the transistor, and a second barrier layer in contact with the first barrier layer. The oxide is in contact with an insulator including an excess-oxygen region. The insulator is in contact with the first barrier layer. The first barrier layer has a thickness greater than or equal to 0.5 nm and less than or equal to 1.5 nm. The second barrier layer is thicker than the first barrier layer.
1. A semiconductor device comprising:
a transistor including an oxide, a gate electrode, and an insulator;
a first barrier layer in contact with the insulator; and
a second barrier layer in contact with the first barrier layer,
wherein the insulator includes an excess-oxygen region, is provided over and in contact with the oxide, and extends beyond an edge of the gate electrode,
wherein the first barrier layer has a thickness greater than or equal to 0.5 nm and less than or equal to 1.5 nm, and
wherein the second barrier layer is thicker than the first barrier layer.
2. The semiconductor device according to claim 1 , wherein the second barrier layer has a thickness greater than or equal to 3 nm.
3. The semiconductor device according to claim 1 , wherein the insulator serves as a gate insulator.
4. The semiconductor device according to claim 1 , wherein the oxide is an In-M-Zn oxide, wherein the element M is one or more kinds selected from aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.
5. The semiconductor device according to claim 1 ,
wherein each of the first barrier layer and the second barrier layer contains one of silicon oxide, silicon oxynitride, silicon nitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate, strontium titanate, and (Ba,Sr)TiO3.
6. The semiconductor device according to claim 1 , further comprising:
a first insulator under the transistor; and
a second insulator over the second barrier layer.
7. The semiconductor device according to claim 6 ,
wherein each of the first insulator and the second insulator contains one of silicon nitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate, strontium titanate, and (Ba,Sr)TiO3.
8. A semiconductor device comprising:
a transistor including an oxide and a first insulator;
a first barrier layer in contact with the first insulator;
a second barrier layer in contact with the first barrier layer; and
a second insulator including a second excess-oxygen region over the second barrier layer,
wherein the first insulator includes a first excess-oxygen region,
wherein the first barrier layer has a thickness greater than or equal to 0.5 nm and less than or equal to 1.5 nm, and
wherein the second barrier layer is thicker than the first barrier layer.
9. The semiconductor device according to claim 8 , wherein the second barrier layer has a thickness greater than or equal to 3 nm.
10. The semiconductor device according to claim 8 , wherein the second insulator serves as an interlayer insulator.
11. The semiconductor device according to claim 8 , wherein the oxide is an In-M-Zn oxide, wherein the element M is one or more kinds selected from aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.
12. The semiconductor device according to claim 8 ,
wherein each of the first barrier layer and the second barrier layer contains one of silicon oxide, silicon oxynitride, silicon nitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate, strontium titanate, and (Ba,Sr)TiO3.
13. The semiconductor device according to claim 8 , further comprising:
a third insulator under the transistor; and
a fourth insulator over the second insulator.
14. The semiconductor device according to claim 13 ,
wherein each of the third insulator and the fourth insulator contains one of silicon nitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate, strontium titanate, and (Ba,Sr)TiO3.
15. A method for manufacturing a semiconductor device, comprising the steps of:
forming a transistor including an insulator, an oxide, and a gate electrode;
forming a first barrier layer over the transistor by an ALD method to a thickness greater than or equal to 0.5 nm and less than or equal to 1.5 nm, and
forming a second barrier layer over the first barrier layer by a sputtering method to a thickness greater than that of the first barrier layer, so that an excess-oxygen region is formed in the insulator,
wherein the insulator is provided over and in contact with the oxide and extends beyond an edge of the gate electrode.
16. The method for manufacturing a semiconductor device, according to claim 15 , wherein the second barrier layer has a thickness greater than or equal to 3 nm.
17. The method for manufacturing a semiconductor device, according to claim 15 , wherein the insulator serves as a gate insulator.
18. The method for manufacturing a semiconductor device, according to claim 15 , wherein the oxide is an In-M-Zn oxide, wherein the element M is one or more kinds selected from aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.
19. The method for manufacturing a semiconductor device, according to claim 15 ,
wherein each of the first barrier layer and the second barrier layer contains one of silicon oxide, silicon oxynitride, silicon nitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate, strontium titanate, and (Ba,Sr)TiO3.
20. The method for manufacturing a semiconductor device, according to claim 15 , further comprising:
forming a first insulator before forming the transistor; and
forming a second insulator after forming the second barrier layer.
21. The method for manufacturing a semiconductor device, according to claim 20 ,
wherein each of the first insulator and the second insulator contains one of silicon nitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate, strontium titanate, and (Ba,Sr)TiO3.
22. A method for manufacturing a semiconductor device, comprising the steps of:
forming a transistor including an oxide, a first insulator, and a gate electrode;
forming a first barrier layer over the first insulator by an ALD method to a thickness greater than or equal to 0.5 nm and less than or equal to 1.5 nm,
forming a second barrier layer over the first barrier layer by a sputtering method to a thickness greater than that of the first barrier layer; and
forming a second insulator including a second excess-oxygen region over the second barrier layer,
wherein the first insulator including a first excess-oxygen region.
23. The method for manufacturing a semiconductor device, according to claim 22 , wherein the second barrier layer has a thickness greater than or equal to 3 nm.
24. The method for manufacturing a semiconductor device, according to claim 22 , wherein the second insulator serves as an interlayer insulator.
25. The method for manufacturing a semiconductor device, according to claim 22 , wherein the oxide is an In-M-Zn oxide, wherein the element M is one or more kinds selected from aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.
26. The method for manufacturing a semiconductor device, according to claim 22 ,
wherein each of the first barrier layer and the second barrier layer contains one of silicon oxide, silicon oxynitride, silicon nitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate, strontium titanate, and (Ba,Sr)TiO3.
27. The method for manufacturing a semiconductor device, according to claim 22 , further comprising:
forming a third insulator before forming the transistor; and
forming a fourth insulator after forming the second barrier layer.
28. The method for manufacturing a semiconductor device, according to claim 27 ,
wherein each of the third insulator and the fourth insulator contains one of silicon nitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate, strontium titanate, and (Ba,Sr)TiO3.
29. A semiconductor device comprising:
a transistor including an oxide, a gate electrode, and an insulator;
a first barrier layer in contact with the insulator; and
a second barrier layer in contact with the first barrier layer,
wherein the insulator includes an excess-oxygen region, is provided over and in contact with the oxide, and extends beyond an edge of the gate electrode, and
wherein the second barrier layer is thicker than the first barrier layer.
30. The semiconductor device according to claim 29 , wherein the insulator serves as a gate insulator.
31. The semiconductor device according to claim 29 , wherein the oxide is an In—M—Zn oxide, wherein the element M is one or more kinds selected from aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.
32. The semiconductor device according to claim 29 ,
wherein each of the first barrier layer and the second barrier layer contains one of silicon oxide, silicon oxynitride, silicon nitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate, strontium titanate, and (Ba,Sr)TiO3.
33. The semiconductor device according to claim 29 , further comprising:
a first insulator under the transistor; and
a second insulator over the second barrier layer.
34. The semiconductor device according to claim 33 ,
wherein each of the first insulator and the second insulator contains one of silicon nitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate, strontium titanate, and (Ba,Sr)TiO3.
35. A semiconductor device comprising:
a transistor including an oxide and a first insulator;
a first barrier layer in contact with the first insulator;
a second barrier layer in contact with the first barrier layer; and
a second insulator including a second excess-oxygen region over the second barrier layer,
wherein the first insulator includes a first excess-oxygen region, and
wherein the second barrier layer is thicker than the first barrier layer.
36. The semiconductor device according to claim 35 , wherein the second insulator serves as an interlayer insulator.
37. The semiconductor device according to claim 35 , wherein the oxide is an In—M—Zn oxide, wherein the element M is one or more kinds selected from aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.
38. The semiconductor device according to claim 35 ,
wherein each of the first barrier layer and the second barrier layer contains one of silicon oxide, silicon oxynitride, silicon nitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate, strontium titanate, and (Ba,Sr)TiO3.
39. The semiconductor device according to claim 35 , further comprising:
a third insulator under the transistor; and
a fourth insulator over the second insulator.
40. The semiconductor device according to claim 39 ,
wherein each of the third insulator and the fourth insulator contains one of silicon nitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate, strontium titanate, and (Ba,Sr)TiO3.