Module and method for manufacturing same
A module includes a wiring board, a plurality of components mounted on an upper surface of the wiring board, a sealing resin layer which seals the components provided on the upper surface of the wiring board, and a shield layer provided so as to cover a surface of the sealing resin layer. The shield layer includes an adhesion layer which is stacked on the surface of the sealing resin layer and includes a first adhesion film composed of a metal selected from the group consisting of Ti, Cr, Ni, TiCr, TiAl, NiAl, CrAl, and CrNiAl, a conductive layer which is stacked on the adhesion layer, and a protective layer which is stacked on the conductive layer and includes a protective film composed of a nitride, oxide, or oxynitride of a metal selected from the group consisting of Ti, Cr, Ni, TiCr, TiAl, NiAl, CrAl, and CrNiAl.
1. A module comprising: a wiring board; a component mounted on a principal surface of the wiring board; a sealing resin layer provided on the principal surface of the wiring board and covering the component; and a shield layer provided so as to cover a surface of the sealing resin layer, wherein the shield layer includes: an adhesion layer stacked over the surface of the sealing resin layer and including a first adhesion film composed of a metal selected from a group consisting of Ti, Cr, Ni, TiCr, TiAl, NiAl, CrAl, and CrNiAl; a conductive layer stacked over the adhesion layer; and a protective layer stacked over the conductive layer and including a protective film composed of a nitride, an oxide or an oxynitride of a metal selected from the group consisting of Ti, Cr, Ni, TiCr, TiAl, NiAl, CrAl, and CrNiAl; wherein the protective film is composed of a nitride, an oxide or an oxynitride of a same metal as the metal of the first adhesion film.
2. The module according to claim 1 , wherein the protective layer further includes a second adhesion film composed of a metal selected from the group consisting of Ti, Cr, Ni, TiCr, TiAl, NiAl, CrAl, and CrNiAl, the second adhesion film being disposed between the conductive layer and the protective film.
3. The module according to claim 1 , wherein a composition ratio of nitrogen in the nitride or a composition ratio of oxygen in the oxide constituting the protective film is lower in an inner layer side of the protective film close to the conductive layer than in an outer layer side of the protective film far from the conductive layer.
4. The module according to claim 1 , wherein among the adhesion layer, the conductive layer, and the protective layer, the conductive layer has the largest thickness, and the adhesion layer has the smallest thickness.
5. The module according to claim 1 , wherein the first adhesion film is composed of a TiAl alloy, the conductive layer is composed of Cu, and the protective film is composed of a nitride of a TiAl alloy.
6. The module according to claim 1 , wherein the first adhesion film is composed of a TiAl alloy, the conductive layer is composed of Cu, and the protective film is composed of an oxynitride of a TiAl alloy.
7. The module according to claim 2 , wherein the second adhesion film is composed of a TiAl alloy.
8. The module according to claim 1 , wherein the protective film is black in color.
9. The module according to claim 2 , wherein a composition ratio of nitrogen in the nitride or a composition ratio of oxygen in the oxide constituting the protective film is lower in an inner layer side of the protective film close to the conductive layer than in an outer layer side of the protective film far from the conductive layer.
10. The module according to claim 2 , wherein among the adhesion layer, the conductive layer, and the protective layer, the conductive layer has the largest thickness, and the adhesion layer has the smallest thickness.
11. The module according to claim 3 , wherein among the adhesion layer, the conductive layer, and the protective layer, the conductive layer has the largest thickness, and the adhesion layer has the smallest thickness.
12. The module according to claim 3 , wherein the first adhesion film is composed of a TiAl alloy, the conductive layer is composed of Cu, and the protective film is composed of a nitride of a TiAl alloy.
13. The module according to claim 4 , wherein the first adhesion film is composed of a TiAl alloy, the conductive layer is composed of Cu, and the protective film is composed of a nitride of a TiAl alloy.