Photoresists and methods of use thereof
New photoresist are provided that comprises a low-Tg component and that are particularly useful for ion implant lithography applications. Preferred photoresists of the invention can exhibit good adhesion to underlying inorganic surfaces such as SiON, silicon oxide, silicon nitride and other inorganic surfaces.
1. A method for providing an ion-implanted semiconductor substrate comprising:
providing a semiconductor substrate having coated thereon a relief image of chemically-amplified positive-acting photoresist composition,
wherein the photoresist comprises 1) a resin, 2) a photoactive component and 3) a resin having a Tg of at least about 5° C. less than the resin 1), and
wherein the resin 3) comprises polymerized units of diethylene glycol methacrylate and/or diethylene glycol acrylate; and
applying ions to the substrate.
2. The method of claim 1 wherein the resin 3) has a weight average molecular weight of about 8,000 or less.
3. The method of claim 1 wherein the resin 3) has a weight average molecular weight of about 5,000 or less.
4. The method of claim 1 wherein the resin 3) has a weight average molecular weight of less than 5000.
5. The method of claim 1 wherein the resin 3) has a weight average molecular weight of less than 3000.
6. The method of claim 1 wherein the resin 3) has a weight average molecular weight of less than 2000.
7. The method of claim 1 wherein the resin 1) and the resin 3) that each comprise photoacid acid labile groups.
8. The method of claim 1 where the resin 3) has a Tg of at least about 10° C. less than the resin 1).
9. The method of claim 1 where the resin 3) has a Tg of at least about 15° C. less than the resin 1).