Semiconductor device with stripe-shaped trench gate structures, transistor mesas and diode mesas

1. A semiconductor device comprising:

stripe-shaped trench gate structures extending into a first surface of a semiconductor body, the semiconductor body based on a semiconductor material with hexagonal crystal lattice, wherein trench sidewalls of the trench gate structure are aligned with (1-100) and (−1100) crystal planes; and

transistor mesas between neighboring trench gate structures, the transistor mesas comprising body regions forming first pn junctions with a drift structure and second pn junctions with source zones;

diode mesas between neighboring trench gate structures, the diode mesas comprising diode regions that directly adjoin the neighboring trench gate structures and form a third p-n junction with the drift structure,

wherein the diode regions form contiguous regions extending from the first surface of the semiconductor body to a bottom of the diode regions that is coextensive with the third p-n junction,

wherein between central bottoms of two of the neighboring trench gate structures, the bottom of the diode regions extends continuously along a plane that is parallel to the first surface and is beneath the central bottoms of the two of the neighboring trench gate structures,

wherein each of the diode regions comprise a contact portion and a shielding portion,

wherein the contact portion extends from the first surface to the shielding portion,

wherein the contact portion extends deeper into the semiconductor body than the body regions,

wherein the shielding portion extends from the contact portion to the bottom of the diode regions, and

wherein a mean net dopant concentration in the contact portions is higher than a mean net dopant concentration in the shielding portions.

2. The semiconductor device of claim 1 , wherein

the shielding portions include sections that do not vertically overlap with the transistor mesas.

3. The semiconductor device of claim 1 , wherein

the drift structure comprises a lightly doped drift zone and current spread zones between the drift zone and the body regions, and a mean net dopant concentration in the current spread zones is at least twice as high as a mean net dopant concentration in the drift zone.

4. The semiconductor device of claim 1 , wherein

charge carrier mobility is equal along both longitudinal sidewalls of the trench gate structures.

5. The semiconductor device of claim 1 , wherein

the source zones directly adjoin to two neighboring trench gate structures, respectively.

6. The semiconductor device of claim 1 , wherein

a first surface of the semiconductor body from which the trench gate structures extend into the semiconductor body is a staggered surface with first surface sections formed by (0001) crystal planes and second surface sections connecting the first surface sections and wherein longitudinal axes of the trench gate structures run orthogonal to steps resulting from different orientations of the first and second surface sections in the staggered first surface.

7. The semiconductor device of claim 6 , wherein

a mean surface plane cutting the steps at half step height is substantially parallel to the <11-20> crystal plane of the semiconductor material.

8. The semiconductor device of claim 1 , wherein

the transistor and diode mesas further alternate, separated by the trench gate structures, along a second horizontal direction orthogonal to the first horizontal that is parallel to the trench sidewalls and a first surface of the semiconductor body.

9. The semiconductor device of claim 1 , wherein

a first length of the transistor mesas along a first horizontal direction that is parallel to the trench sidewalls and a first surface of the semiconductor body and a second length of the diode mesas along the first horizontal direction are equal.

10. The semiconductor device of claim 1 , wherein

a first length of the transistor mesas along the first horizontal direction is parallel to the trench sidewalls and a first surface of the semiconductor body is greater than a second length of the diode mesas along the first horizontal direction.

11. The semiconductor device of claim 1 , wherein

portions of the diode regions in a distance to the first surface greater than a vertical extension of the trench gate structures form a contiguous shielding layer with openings centered to the transistor mesas.

12. The semiconductor device of claim 11 , wherein the openings are rotational-symmetric.

13. The semiconductor device of claim 11 , wherein the openings are circular openings.

14. The semiconductor device of claim 1 , wherein ohmic contacts of the source zone and diode regions are formed along the first surface.

15. The semiconductor device of claim 1 , wherein the semiconductor body is formed from 4H—SiC.

16. The semiconductor device of claim 1 , wherein

the stripe-shaped trench gate structures extend in a horizontal direction parallel to a <11-20> crystal direction.

17. The semiconductor device of claim 1 , wherein the mean net dopant concentration in the contact portions is at least twice as high as the mean net dopant concentration in the shielding portions.

18. A semiconductor device comprising:

stripe-shaped trench gate structures in a semiconductor body based on a semiconductor material with hexagonal crystal lattice, wherein trench sidewalls of the trench gate structure are aligned with (1-100) and (−1100) crystal planes;

transistor mesas between neighboring trench gate structures, the transistor mesas comprising body regions forming first pn junctions with a drift structure and second pn junctions with source zones; and

diode mesas comprising at least portions of diode regions that form third pn junctions with the drift structure and that directly adjoin two neighboring trench gate structures, respectively,

wherein the transistor and diode mesas alternate at least along a first horizontal direction, the first horizontal direction being parallel to the trench sidewalls and a first surface of the semiconductor body,

wherein portions of the diode regions in a distance to the first surface greater than a vertical extension of the trench gate structures form a contiguous shielding layer with openings centered to the transistor mesas, and

wherein the openings are circular openings.

19. A semiconductor device comprising:

stripe-shaped trench gate structures extending into a first surface of a semiconductor body, the semiconductor body based on a semiconductor material with hexagonal crystal lattice, wherein trench sidewalls of the trench gate structure are aligned with (1-100) and (−1100) crystal planes; and

transistor portions between neighboring trench gate structures, the transistor portions comprising body regions forming first pn junctions with a drift structure and second pn junctions with source zones;

diode portions between neighboring trench gate structures, the diode portions comprising diode regions that directly adjoin the neighboring trench gate structures and form a third p-n junction with the drift structure,

wherein the diode portions form a contiguous region extending from the first surface of the semiconductor body to a bottom of the diode region that is coextensive with the third p-n junction, and

wherein from between central bottoms of two of the neighboring trench gate structures, the bottom of the diode portions extends continuously along a plane that is parallel to the first surface and is beneath the central bottoms of the two of the neighboring trench gate structures,

wherein each of the diode regions comprise a contact portion and a shielding portion,

wherein the contact portion extends from the first surface to the shielding portion,

wherein the contact portion extends deeper into the semiconductor body than the body regions,

wherein the shielding portion extends from the contact portion to the bottom of the diode regions, and

wherein a mean net dopant concentration in the contact portions is higher than a mean net dopant concentration in the shielding portions.