CMOS image sensor including photodiodes with overlying superlattices to reduce crosstalk
A CMOS image sensor may include a semiconductor substrate having a first conductivity type, and a plurality of laterally adjacent photodiodes formed in the substrate. Each photodiode may include a retrograde well extending downward into the substrate from a surface thereof and having a second conductivity type, a first well around a periphery of the retrograde well having the second conductivity type, and a second well within the retrograde well having the first conductivity type. Each photodiode may further include first and second superlattices respectively overlying each of the first and second wells. Each of the first and second superlattices may include a plurality of stacked groups of layers, with each group of layers including a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.
1. A CMOS image sensor comprising:
a semiconductor substrate having a first conductivity type; and
a plurality of laterally adjacent photodiodes formed in the substrate and each comprising
a retrograde well extending downward into the substrate from a surface thereof and having a second conductivity type,
a first well around a periphery of the retrograde well having the second conductivity type,
a second well within the retrograde well having the first conductivity type, and
first and second superlattices respectively overlying each of the first and second wells, each of the first and second superlattices comprising a plurality of stacked groups of layers, each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.
2. The CMOS image sensor of claim 1 wherein the first well defines a ring, and wherein the second well is within the ring.
3. The CMOS image sensor of claim 1 wherein the second well comprises a lower portion and an upper portion, the upper portion having a higher dopant concentration than the lower portion.
4. The CMOS image sensor of claim 1 further comprising a shallow trench isolation (STI) region between the first and second wells.
5. The CMOS image sensor of claim 1 further comprising a respective shallow trench isolation (STI) region between pairs of laterally adjacent photodiodes.
6. The CMOS image sensor of claim 1 further comprising a respective microlens overlying each of the photodiodes.
7. The CMOS image sensor of claim 1 further comprising a respective color filter overlying each of the photodiodes.
8. The CMOS image sensor of claim 1 wherein the first and second superlattices each further comprises a semiconductor cap layer thereon.
9. The CMOS image sensor of claim 1 wherein the at least one non-semiconductor monolayer comprises oxygen.
10. The CMOS image sensor of claim 1 wherein the semiconductor monolayers comprise silicon.
11. A CMOS image sensor comprising:
a semiconductor substrate having a first conductivity type; and
a plurality of laterally adjacent photodiodes formed in the substrate and each comprising
a retrograde well extending downward into the substrate from a surface thereof and having a second conductivity type,
a first well around a periphery of the retrograde well also having the second conductivity type,
a second well within the retrograde well having the first conductivity type,
first and second superlattices respectively overlying each of the first and second wells, each of the first and second superlattices comprising a plurality of stacked groups of layers, each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions;
a respective color filter overlying each of the photodiodes; and
a respective microlens overlying each of the color filters.
12. The CMOS image sensor of claim 11 wherein the first well defines a ring, and wherein the second well is within the ring.
13. The CMOS image sensor of claim 11 wherein the second well comprises a lower portion and an upper portion, the upper portion having a higher dopant concentration than the lower portion.
14. The CMOS image sensor of claim 11 further comprising a shallow trench isolation (STI) region between the first and second wells.
15. A CMOS image sensor comprising:
a semiconductor substrate having a first conductivity type; and
a plurality of laterally adjacent photodiodes formed in the substrate and each comprising
a retrograde well extending downward into the substrate from a surface thereof and having a second conductivity type,
a first well around a periphery of the retrograde well also having the second conductivity type,
a second well within the retrograde well having the first conductivity type, and
first and second superlattices respectively overlying each of the first and second wells, each of the first and second superlattices comprising a plurality of stacked groups of layers, each group of layers comprising a plurality of stacked base silicon monolayers defining a base semiconductor portion, and at least one oxygen monolayer constrained within a crystal lattice of adjacent base silicon portions.
16. The CMOS image sensor of claim 15 wherein the first well defines a ring, and wherein the second well is within the ring.
17. The CMOS image sensor of claim 15 wherein the second well comprises a lower portion and an upper portion, the upper portion having a higher dopant concentration than the lower portion.
18. The CMOS image sensor of claim 15 further comprising a shallow trench isolation (STI) region between the first and second wells.
19. The CMOS image sensor of claim 15 further comprising a respective microlens overlying each of the photodiodes.
20. The CMOS image sensor of claim 15 further comprising a respective color filter overlying each of the photodiodes.