Surface acoustic wave device and manufacturing method therefor
In a surface acoustic wave device, a conductor pattern is located on a main surface of a piezoelectric substrate and includes a surface acoustic wave element pattern, a pad and a feed line that is electrically connected to the pad and extends up to an outer peripheral edge of the main surface. The piezoelectric substrate and a cover are bonded to each other with a support layer therebetween that includes a frame extending along the outer peripheral edge of the main surface so that a gap is provided between the frame and the outer peripheral edge and includes a pad adjacent portion on the pad. Thus, a closed space is surrounded by the piezoelectric substrate, the cover and the frame. The support layer further includes a reinforcement portion that intersects a feed line at or near an intersection portion in which a separated portion of the frame that is separated from the pad adjacent portion intersects the feed line.
1. A surface acoustic wave device comprising:
a piezoelectric substrate including a main surface;
a conductor pattern located on the main surface and including a surface acoustic wave element pattern, a pad and a feed line that is electrically connected to the pad and extends up to an outer peripheral edge of the main surface;
a support layer including a frame that is located on the main surface and has a frame-shaped structure that extends along the outer peripheral edge of the main surface and so that a gap is provided between the frame and the outer peripheral edge, and a pad adjacent portion that is located on the pad;
a cover that is bonded to the support layer and faces the main surface; and
a through conductor that is electrically connected to the pad and is located inside a through hole that penetrates through the pad adjacent portion of the support layer in a direction in which the main surface is viewed in plan; wherein
a closed space is provided and surrounded by the piezoelectric substrate, the cover and the support layer;
the feed line includes a separated feed line that intersects a separated portion of the frame that is separated from the pad adjacent portion; and
the support layer further includes a reinforcement portion that is located on the main surface and intersects the separated feed line close to the separated portion.
2. The surface acoustic wave device according to claim 1 , wherein the reinforcement portion is located on an outer side of the frame; and
a width of the reinforcement portion, which is a dimension in a direction in which the reinforcement portion intersects the separated feed line, progressively becomes larger toward the frame.
3. The surface acoustic wave device according to claim 1 , wherein
the reinforcement portion is located on an outer side of the frame; and
a width of the reinforcement portion, which is a dimension in a direction in which the reinforcement portion intersects the separated feed line, becomes larger in a stepwise manner toward the frame.
4. The surface acoustic wave device according to claim 1 , wherein the reinforcement portion is located outside the frame and is separated from the frame.
5. The surface acoustic wave device according to claim 1 , wherein the reinforcement portion is integrated with the frame on an outer side of the frame.
6. The surface acoustic wave device according to claim 1 , wherein the reinforcement portion includes a plurality of reinforcement portions provided only in portions of the support layer.
7. The surface acoustic wave device according to claim 1 , wherein the reinforcement portion includes a plurality of reinforcement portions integrated with the frame on an outer same of the frame.
8. The surface acoustic wave device according to claim 7 , wherein a width of each of the reinforcement portions, which is a dimension in a direction in which the plurality of reinforcement portions intersect the separated feed line, progressively becomes larger toward the frame.
9. The surface acoustic wave device according to claim 7 , wherein the reinforcement portion is integrated with the frame on an outer same of the frame, and a width of the reinforcement portion, which is a dimension in a direction in which the plurality of reinforcement portions intersect the separated feed line, progressively becomes larger in a stepwise manner toward the frame.
10. The surface acoustic wave device according to claim 7 , wherein the separated feed line is one of a single layer feed line and a two layer feed line.