Solid-state imaging device and electronic apparatus including light shielding structures
A solid-state imaging device includes a plurality of pixels each of which includes a photoelectric conversion unit that generates charges by photoelectrically converting light, and a transistor that reads a pixel signal of a level corresponding to the charges generated in the photoelectric conversion unit. A phase difference pixel which is at least a part of the plurality of pixels is configured in such a manner that the photoelectric conversion unit is divided into a plurality of photoelectric conversion units and an insulated light shielding film is embedded in a region for separating the plurality of photoelectric conversion units, which are divided, from each other.
1. An imaging device comprising:
a substrate, the substrate including a photoelectric conversion region and a light shielding structure;
an on-chip lens layer on a light incident side of the substrate, wherein the on-chip lens layer includes a first on-chip lens; and
a wiring layer disposed on a side of the substrate opposite the light incident side of the substrate, wherein the wiring layer includes a plurality of wirings,
wherein the light shielding structure is disposed in the substrate and has a cross shape in a plan view taken from the light incident side, and
wherein the first on-chip lens and the cross shape overlap in the plan view from the light incident side.
2. The imaging device according to claim 1 ,
wherein the photoelectric conversion region is configured to receive light through the first on-chip lens.
3. The imaging device according to claim 2 ,
wherein the photoelectric conversion region includes first and second photodiodes, and
wherein the first and second photodiodes are configured to receive light divided by the light shielding structure.
4. The imaging device according to claim 3 ,
wherein first and second pixel signals are generated based on photoelectric conversion performed by the first and second photodiodes, and
wherein a phase difference detection is performed based on the first and second pixel signals.
5. The imaging device according to claim 1 ,
wherein the light shielding structure has a square shape surrounding the cross shape in the plan view from the light incident side, and
wherein the photoelectric conversion region is configured to receive light divided into four parts by the light shielding structure.
6. The imaging device according to claim 5 ,
wherein sizes of the divided four parts are set unevenly.
7. The imaging device according to claim 1 ,
wherein a second on-chip lens is disposed in the on-chip lens layer, the first and second on-chip lenses being arranged in a pixel array unit,
wherein the first on-chip lens is closer to a center of the pixel array unit than the second on-chip lens,
wherein a part of the light shielding structure that overlaps the first on-chip lens is arranged at a first distance from a center of the first on-chip lens,
wherein a part of the light shielding structure overlaps the second on-chip lens and is arranged at a second distance from a center of the second on-chip lens, and
wherein the second distance is larger than the first distance.
8. The imaging device according to claim 7 ,
wherein the on-chip lens layer includes a third on-chip lens,
wherein the cross shape of the light shielding structure is not formed behind the third on-chip lens.
9. The imaging device according to claim 1 ,
wherein the light shielding structure includes a metal material.
10. The imaging device according to claim 1 ,
wherein the photoelectric conversion region includes four photodiodes divided by the light shielding structure.
11. The imaging device according to claim 1 ,
wherein the plurality of wirings comprises four wirings, and
wherein the first on-chip lens and the four wirings overlap in the plan view from the light incident side.
12. The imaging device according to claim 1 ,
wherein the first on-chip lens and a part of a transfer transistor overlap in the plan view from the light incident side.
13. An imaging device comprising:
a substrate, the substrate including a photoelectric conversion region and a light shielding structure;
an on-chip lens layer on a light incident side of the substrate, wherein the on-chip lens layer includes a first on-chip lens; and
a wiring layer disposed on a side of the substrate opposite the light incident side of the substrate, wherein the wiring layer includes a plurality of wirings,
wherein the light shielding structure is disposed in the substrate and has a cross shape in a plan view taken from the light incident side, and
wherein the cross shape of the light shielding structure is formed behind the first on-chip lens.
14. The imaging device according to claim 13 ,
wherein the photoelectric conversion region is configured to receive light through the first on-chip lens,
wherein first and second pixel signals are generated based on photoelectric conversion performed by the photoelectric conversion region, and
wherein a phase difference detection is performed based on the first and second pixel signals.
15. The imaging device according to claim 13 ,
wherein the light shielding structure has a square shape surrounding the cross shape in the plan view from the light incident side, and
wherein the photoelectric conversion region is configured to receive light divided into four parts by the light shielding structure.
16. The imaging device according to claim 15 ,
wherein sizes of the divided four parts are set unevenly.
17. The imaging device according to claim 13 ,
wherein a second on-chip lens is disposed in the on-chip lens layer, the first and second on-chip lenses being arranged in a pixel array unit,
wherein the first on-chip lens is closer to a center of the pixel array unit than the second on-chip lens,
wherein a part of the light shielding structure that overlaps the first on-chip lens is arranged at a first distance from a center of the first on-chip lens,
wherein a part of the light shielding structure overlaps the second on-chip lens and is arranged at a second distance from a center of the second on-chip lens, and
wherein the second distance is larger than the first distance.
18. The imaging device according to claim 17 ,
wherein the on-chip lens layer includes a third on-chip lens,
wherein the cross shape of the light shielding structure is not formed behind the third on-chip lens.
19. The imaging device according to claim 13 ,
wherein the plurality of wirings comprises four wirings,
wherein the first on-chip lens and the four wirings overlap in the plan view from the light incident side, and
wherein the first on-chip lens and a part of a transfer transistor overlap in the plan view from the light incident side.
20. An imaging system comprising:
an optical unit configured to receive light from an object,
an imaging device configured to receive light through the optical unit, and
a signal processing circuit configured to perform signal processes on pixel signals output from the imaging device,
the imaging device having:
a substrate, the substrate including a photoelectric conversion region and a light shielding structure;
an on-chip lens layer on a light incident side of the substrate, wherein the on-chip lens layer includes a first on-chip lens; and
a wiring layer disposed on a side of the substrate opposite the light incident side of the substrate, wherein the wiring layer includes a plurality of wirings,
wherein the light shielding structure is disposed in the substrate and has a cross shape in a plan view taken from the light incident side, and
wherein the first on-chip lens and the cross shape overlap in the plan view from the light incident side.