Poly gate extension source to body contact
The present disclosure relates to semiconductor structures and, more particularly, to poly gate extension source to body contact structures and methods of manufacture. The structure includes: a substrate having a doped region; a gate structure over the doped region, the gate structure having a main body and a gate extension region; and a body contact region straddling over the gate extension region and remote from the main body of the gate structure.
1. A structure, comprising:
a substrate having a doped body region of a first dopant type;
a gate structure over the doped body region of the first dopant type, the gate structure having a main body comprising a second dopant type and a gate extension region comprising the first dopant type; and
a body contact region straddling over the gate extension region and remote from the main body of the gate structure.
2. The structure of claim 1 , wherein the body contact region is a P+ body contact diffusion region, formed over a source side of the gate structure.
3. The structure of claim 1 , wherein the gate structure is a T-shaped gate structure with a main body of the T-shaped gate structure having a minimum dimension for a design rule.
4. The structure of claim 1 , wherein the body contact region does not overlap a channel region of the gate structure.
5. The structure of claim 4 , wherein a channel width of the gate structure remains constant under the main body.
6. The structure of claim 4 , wherein the body contact region straddles over an end of the gate extension region.
7. The structure of claim 6 , wherein the body contact region extends within an shallow trench isolation region.
8. The structure of claim 6 , wherein the body contact region is entirely within the doped body region of the first dopant type of the substrate, remote from an end of the gate extension region.
9. The structure of claim 8 , wherein the gate extension region extends within a shallow trench isolation region.
10. The structure of claim 6 , wherein the body contact region is entirely within the doped region of the substrate, over the end of the gate extension region.
11. The structure of claim 1 , wherein the gate extension region extends between two main bodies of the gate structure, forming an H-body, and the body contact region is shared between the two main bodies.
12. A structure comprising:
a semiconductor on insulator substrate (SOI) having a doped well region;
a T-shaped gate structure formed on the doped well region, the T-shaped gate structure including a main body having a channel with constant width and a gate extension region extending from the main body;
a source region on a first side of the main body of the T-shaped gate structure and a drain region on a side of the main body of the gate structure; and
a diffusion contact body region abutting the source region of the T-shaped gate structure adjacent to the channel, and straddling the gate extension region of the T-shaped gate structure and remote from the channel.
13. The structure of claim 12 , wherein the gate extension region has a width larger than a minimum overlay.
14. The structure of claim 12 , wherein the gate extension region has a length as small as a minimum lithographic channel length.
15. The structure of claim 12 , wherein the diffusion contact body region straddles the gate extension region within the well region.
16. The structure of claim 12 , wherein the diffusion contact body region straddles the gate extension region partly outside of the well region.
17. The structure of claim 12 , wherein the diffusion contact body region is spaced larger than a lithographic overlay from the channel.
18. The structure of claim 12 , wherein the doped well region is a first dopant type, the main body of the gate structure comprises a second dopant type and the gate extension region of the gate structure comprising the first dopant type.
19. A method, comprising:
forming a gate structure on a substrate having a first dopant type, the gate structure formed with a main body of a second dopant type over a channel region and a gate extension region of the first dopant type extending from the main body;
forming diffusion regions on opposing sides of the channel region; and
forming a body contact diffusion region over one of the diffusion regions of the main body, remote from the channel region and straddling the gate extension region.
20. The method of claim 19 , wherein the gate structure is formed into a T-shaped gate structure.