Semiconductor device, fabrication method for a semiconductor device and electronic apparatus
Disclosed herein is a semiconductor device, including: a first substrate including a first electrode, and a first insulating film configured from a diffusion preventing material for the first electrode and covering a periphery of the first electrode, the first electrode and the first insulating film cooperating with each other to configure a bonding face; and a second substrate bonded to and provided on the first substrate and including a second electrode joined to the first electrode, and a second insulating film configured from a diffusion preventing material for the second electrode and covering a periphery of the second electrode, the second electrode and the second insulating film cooperating with each other to configure a bonding face to the first substrate.
1. An imaging device, comprising:
a first substrate including a photodiode, a floating diffusion, a first plurality of transistors and a first electrode at a first surface side of the first substrate opposite to a light incident surface side; and
a second substrate including a second electrode at a first surface side of the second substrate and a second plurality of transistors,
wherein the first substrate and the second substrate are bonded to each other such that the first surface side of the first substrate and the first surface side of the second substrate are facing to each other,
wherein a side of the first electrode is covered by a first insulating film,
wherein a portion of the first electrode and a portion of the first insulating film are bonded to the second electrode, and
wherein, except for a bonding face of the first electrode, the first electrode is covered by the first insulating film.
2. The imaging device according to claim 1 , wherein the first insulating film includes one of Ti, Ta, Ru, or any nitrides of Ti, Ta, or Ru.
3. The imaging device according to claim 1 , wherein, except for a bonding face of the second electrode, the second electrode is covered by a second insulating film.
4. The imaging device according to claim 1 , wherein a portion of the first insulating film is bonded to the second electrode.
5. The imaging device according to claim 1 , wherein the first electrode and the second electrode are different sizes.
6. The imaging device according to claim 5 , wherein the first electrode is smaller than the second electrode.
7. The imaging device according to claim 1 , wherein the first insulating film is a barrier metal film.
8. An imaging device, comprising:
a first substrate including a photodiode, a floating diffusion, a first plurality of transistors and a first electrode at a first surface side of the first substrate opposite to a light incident surface side; and
a second substrate including a second electrode at a first surface side of the second substrate and a second plurality of transistors,
wherein the first substrate and the second substrate are bonded to each other such that the first surface side of the first substrate and the first surface side of the second substrate are facing to each other,
wherein the first electrode and the second electrode are different sizes, and
wherein the first electrode is smaller than the second electrode.
9. The imaging device according to claim 8 , wherein a first insulating film covers at least a portion of the first electrode.
10. The imaging device according to claim 9 , wherein a second insulating film covers at least a portion of the second electrode.
11. The imaging device according to claim 10 , wherein the first insulating film and the second insulating film include one of Ti, Ta, Ru or any nitrides of Ti, Ta, or Ru.
12. The imaging device according to claim 9 , wherein, except for a bonding face of the first electrode, the first electrode is covered by the first insulating film.
13. The imaging device according to claim 10 , wherein, except for a bonding face of the second electrode, the second electrode is covered by the second insulating film.
14. The imaging device according to claim 8 , wherein the first electrode is disposed in a first interlayer insulating film.
15. The imaging device according to claim 14 , wherein a portion of the first interlayer insulating film is bonded to the second electrode.
16. The imaging device according to the claim 10 , wherein the first insulating film and the second insulating film are barrier metal films.
17. An imaging device, comprising:
a first substrate including a photodiode, a floating diffusion, a first plurality of transistors and a first electrode at a first surface side of the first substrate opposite to a light incident surface side; and
a second substrate including a second electrode at a first surface side of the second substrate, a wiring and a second plurality of transistors,
wherein the first substrate and the second substrate are bonded each other such that the first surface side of the first substrate and the first surface side of the second substrate are facing each other, and
wherein a portion of the second electrode contacts a portion of the wiring via an insulating film.
18. The imaging device according to claim 17 , wherein the insulating film covers at least a portion of the second electrode.
19. The imaging device according to claim 17 , wherein the insulating film includes one of Ti, Ta, Ru or any nitrides of Ti, Ta, or Ru.
20. The imaging device according to claim 17 , wherein, except for a bonding face of the second electrode, the second electrode is covered by the insulating film.
21. The imaging device according to claim 17 , wherein the first electrode is disposed in a first interlayer insulating film.
22. The imaging device according to claim 21 , wherein a portion of the first interlayer insulating film is bonded to the second electrode.
23. The imaging device according to claim 17 , wherein the first electrode and the second electrode are different sizes.
24. The imaging device according to claim 23 , wherein the first electrode is smaller than the second electrode.
25. The imaging device according to claim 17 , wherein the insulating film is a barrier metal film.
26. The imaging device according to claim 17 , wherein a first width of the second electrode at a first side is larger than a second width of the second electrode at a second side opposite to the first side in a cross section view.