Through-package-via (TPV) structures on inorganic interposer and methods for fabricating same
Disclosed herein are, for instance, methods for producing through package vias in a glass interposer. For instance, disclosed herein is a method for producing through package vias in a glass interposer comprising laminating a polymer on at least a portion of a top surface of a glass interposer, removing at least a portion of the polymer and the glass interposer to form a through via, filling at least a portion of the through via with a metal conductor to form a metallization layer, and selectively removing a portion of the metallization layer to form a metalized through package via. Other methods are also disclosed, along with through-package-via structures in glass interposers produced therefrom.
1. A method comprising:
applying a polymer layer on at least a portion of a top surface and a bottom surface of a glass interposer;
removing at least a portion of the polymer layers and at least a portion of the glass of the glass interposer to form a through via with side walls;
filling at least a portion of the through via with a metal conductor to form a metallization layer;
selectively removing at least a portion of the metallization layer to form a metalized through package via; and
depositing the metallization layer on at least a portion of a side wall of the side walls of the through via;
wherein the polymer layers form continuous layers along the top and bottom surfaces of the glass interposer from about a top portion and a bottom portion of the through via.
2. The method of claim 1 further comprising depositing a metallization seed layer on at least a portion of the top surface polymer layer prior to filling at least a portion of the through via with the metal conductor.
3. The method of claim 1 , wherein applying the polymer layers on at least a portion of both the top surface and the bottom surface is performed simultaneously.
4. The method of claim 1 , wherein filling at least a portion of the through via with the metal conductor further comprises closing off one or both of a top portion or a bottom portion of the through via.
5. The method of claim 1 , wherein the polymer layers comprise resin-coated copper.
6. The method of claim 1 further comprising depositing a dielectric layer within the through via.
7. The method of claim 6 , wherein depositing the dielectric layer comprises a depositing process selected from the group consisting of spin coating the dielectric layer, spraying the dielectric layer, dipping the interposer in the dielectric layer, laminating dry films of the dielectric layer, vacuum coating the dielectric layer, and combinations thereof.
8. The method of claim 1 , wherein removing at least a portion of the polymer layers and at least a portion of the glass of the glass interposer comprises using laser or mechanical drilling.
9. The method of claim 1 , wherein removing at least a portion of the polymer layers and at least a portion of the glass of the glass interposer comprises using a laser selected from the group consisting of a CO 2 , UV, and excimer.
10. The method of claim 1 , wherein selectively removing at least a portion of the metallization layer forms at least one interlock.
11. A method comprising:
applying a dielectric on at least a portion of a top surface and a bottom surface of a glass interposer to form a laminated interposer;
removing at least a portion of the glass of the glass interposer and at least a portion of the dielectric on the top and bottom surfaces of the glass interposer to form a void;
filling the void with the dielectric;
removing at least a portion of the dielectric to form at least one high-density through via with side walls;
applying a metallization seed layer on at least a portion of the dielectric and at least a portion of a side wall of the side walls of the at least one high-density through via; and
selectively removing at least a portion of the metallization seed layer to form a metalized through package via;
wherein the dielectric forms a continuous layer along the top and bottom surfaces of the glass interposer from about a top portion and a bottom portion of the void.
12. The method of claim 4 further comprising filling at least a portion of the through via with a filler substance selected from the group consisting of air, polymer, a metal alloy, and a combination thereof.
13. The method of claim 11 , wherein selectively removing at least a portion of the metallization layer forms at least one interlock.
14. The method of claim 1 , wherein the through via has at least a portion of the polymer layer, the metallization seed layer, or a combination thereof formed on at least a portion of a side wall of the side walls of the through via.
15. The method of claim 1 further comprising applying a surface preparation process before applying the polymer layers.
16. The method of claim 11 , further comprising applying a surface preparation process before applying the dielectric.
17. The method of claim 15 , wherein applying the surface preparation process comprises:
plasma treating at least a portion of the top and bottom surfaces of the glass interposer; and
applying an adhesion promoter to at least a portion of the plasma treated surfaces.
18. The method of claim 16 , wherein applying the surface preparation process comprises:
plasma treating at least a portion of the top and bottom surfaces of the glass interposer; and
applying an adhesion promoter to at least a portion of the plasma treated surfaces.