Three-dimensional memory device including germanium-containing vertical channels and method of making the same

1. A method of forming a three-dimensional memory device, comprising:

forming an alternating stack of insulating layers and sacrificial material layers over a substrate, wherein the sacrificial material layers are formed as, or are subsequently replaced with, electrically conductive layers;

forming a memory opening through the alternating stack;

forming a memory film in the memory opening, the memory film comprising a blocking dielectric layer, a charge storage layer, and a tunneling dielectric layer;

depositing a silicon-germanium alloy layer including germanium at an atomic concentration less than 25% within the memory opening over the tunneling dielectric layer; and

performing an oxidation process on the silicon-germanium alloy layer to form a vertical semiconductor channel in an unoxidized remaining material portion of the silicon-germanium alloy layer, wherein the vertical semiconductor channel comprises germanium at an atomic concentration greater than 50%.

2. The method of claim 1 , further comprising forming a silicon cap layer on the silicon-germanium alloy layer prior to performing the oxidation process.

3. The method of claim 2 , wherein the oxidation process converts the silicon cap layer into a semiconductor oxide layer, such that silicon atoms are preferentially incorporated into the semiconductor oxide layer and germanium atoms are preferentially provided into the unoxidized remaining material portion of the silicon-germanium alloy layer.

4. The method of claim 3 , wherein the semiconductor oxide layer forms a silicon oxide or silicon-germanium oxide core which completely fills a remaining portion of the memory opening and has a pillar shape with a vertical axis passing through a geometrical center of the core.

5. The method of claim 4 , wherein the semiconductor oxide layer forms the silicon-germanium oxide core in which an atomic concentration of silicon atoms decreases with a radial distance from the vertical axis.

6. The method of claim 4 , wherein:

the oxidation process comprises a thermal oxidation process;

the thermal oxidation process is performed in multiple steps with different oxidation temperatures that decrease with progression of the thermal oxidation process; and

an oxidation temperature of a last step of the thermal oxidation process is in a range from 800 degrees Celsius to 937 degrees Celsius.

7. The method of claim 1 , further comprising depositing an amorphous silicon or polysilicon seed layer in the memory opening, wherein the silicon-germanium alloy layer is formed on the seed layer.

8. The method of claim 1 , further comprising:

forming a pedestal channel portion at a bottom portion of the memory opening; and

forming an opening through a bottom portion of the memory film, wherein the silicon-germanium alloy layer is formed on the pedestal channel portion.

9. The method of claim 8 , wherein:

the pedestal channel portion is substantially free of germanium upon formation and prior to formation of the memory film; and

germanium atoms diffuse from the silicon-germanium alloy layer into the pedestal channel portion during the oxidation process to provide a vertical germanium concentration gradient such that a germanium concentration decreases within the pedestal channel portion with a distance from an interface between the silicon-germanium oxide material and the pedestal channel portion.

10. The method of claim 1 , wherein the vertical semiconductor channel includes germanium atoms at an atomic concentration greater than 99%.