Lateral bipolar junction transistor with controlled junction
A method of forming a lateral bipolar junction transistor (LBJT) that includes providing a germanium containing layer on a crystalline oxide layer, and patterning the germanium containing layer stopping on the crystalline oxide layer to form a base region. The method may further include forming emitter and collector extension regions on opposing sides of the base region using ion implantation, and epitaxially forming an emitter region and collector region on the crystalline oxide layer into contact with the emitter and collector extension regions. The crystalline oxide layer provides a seed layer for the epitaxial formation of the emitter and collector regions.
1. A lateral bipolar junction transistor (LBJT) device comprising:
a crystalline oxide layer that is selected from the group consisting of cerium oxide (CeO 2 ), lanthanum oxide (La 2 O 3 ), yttrium oxide (Y 2 O 3 ), gadolinium oxide (Gd 2 O 3 ), terbium oxide (Tb 2 O 3 ) and combinations thereof;
a base region comprised of a germanium containing material in bonded engagement to the crystalline oxide layer;
an extrinsic base region formed on the germanium containing material; and
an emitter region and collector region present on opposing sides of the base region, wherein the emitter region and the collector region are in direct contact with the crystalline oxide layer, the emitter and collector region having a crystal lattice substantially matched to the crystalline oxide layer.
2. The lateral bipolar junction transistor (LBJT) of claim 1 , comprising a junction region between each of the emitter region and the collector region and the base region, wherein the junction region has a dopant conductivity type equal to the dopant conductivity type of the emitter and the collector region, wherein a vertical dopant concentration in said junction region is substantially uniform.
3. The lateral bipolar junction transistor (LBJT) of claim 2 , wherein a dopant concentration in said junction ranges from 1×10 19 cm −3 to 1×10 21 cm −3 .
4. The lateral bipolar junction transistor (LBJT) of claim 3 , wherein the emitter region and collector region are composed of non-facetted semiconductor material.
5. The lateral bipolar junction transistor (LBJT) of claim 4 , wherein the emitter and collector region are comprised of an epitaxial semiconductor selected from the group consisting of polysilicon, polysilicon germanium and a combination thereof.
6. The lateral bipolar junction transistor (LBJT) device of claim 1 , further comprising an extrinsic base region comprised of a semiconductor selected from the group consisting of doped polycrystalline silicon germanium and doped polycrystalline silicon, wherein a dopant concentration that provides a conductivity type of the extrinsic base region is greater than a dopant concentration that provides a conductivity type of the base region.