IP Library › Granted Patent US 10,832,761
Granted Patent B2
US 10,832,761 · App. 16/732,951 · Granted Nov 10, 2020

Polarization gate stack SRAM

Inventors: Daniel H. Morris (Hillsboro, OR); Uygar E. Avci (Portland, OR); Ian A. Young (Portland, OR)
Assignee: Intel Corporation
G11C11/412G11C8/16G11C11/419H01L27/11G11C11/223
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Quick Facts
Patent No.
US 10,832,761
App. No.
16/732,951
Granted
Nov 10, 2020
Kind
B2
Abstract

One embodiment provides an apparatus. The apparatus includes a first inverter comprising a first pull up transistor and a first pull down transistor; a second inverter cross coupled to the first inverter, the second inverter comprising a second pull up transistor and a second pull down transistor; a first access transistor coupled to the first inverter; and a second access transistor coupled to the second inverter. A gate electrode of one transistor of each inverter comprises a polarization layer.

Claims (37)

1. An SRAM memory cell, comprising:

a first invertor having a first pull up transistor and a first pull down transistor, wherein the first pull down transistor comprises a first gate stack having a ferroelectric material between a gate oxide and a channel of the first pull down transistor, the ferroelectric material in contact with the gate oxide;

a first access transistor coupled to the first invertor, wherein the first access transistor comprises a second gate stack having a ferroelectric material;

a second invertor having a second pull up transistor and a second pull down transistor; and

a second access transistor coupled to the second invertor.

2. The SRAM memory cell of claim 1 , wherein the second pull down transistor comprises a third gate stack having a ferroelectric material.

3. The SRAM memory cell of claim 1 , wherein the second access transistor comprises a third gate stack having a ferroelectric material.

4. The SRAM memory cell of claim 1 , wherein the second pull down transistor comprises a third gate stack having a ferroelectric material, and wherein the second access transistor comprises a fourth gate stack having a ferroelectric material.

5. The SRAM memory cell of claim 1 , wherein the ferroelectric material of the first gate stack is between and in contact with a first gate oxide and a channel of the first pull down transistor, and wherein the ferroelectric material of the second gate stack is between and in contact with a second gate oxide and a channel of the first access transistor.

6. The SRAM memory cell of claim 1 , wherein the ferroelectric material of the first gate stack and the ferroelectric material of the second gate stack comprise hafnium and oxygen.

7. An SRAM memory cell, comprising:

a first invertor having a first pull up transistor and a first pull down transistor, wherein the first pull down transistor comprises a first gate stack having a polarization layer between a gate oxide and a channel of the first pull down transistor, the polarization layer in contact with the gate oxide;

a first access transistor coupled to the first invertor, wherein the first access transistor comprises a second gate stack having a polarization layer;

a second invertor having a second pull up transistor and a second pull down transistor; and

a second access transistor coupled to the second invertor.

8. The SRAM memory cell of claim 7 , wherein the second pull down transistor comprises a third gate stack having a polarization layer.

9. The SRAM memory cell of claim 7 , wherein the second access transistor comprises a third gate stack having a polarization layer.

10. The SRAM memory cell of claim 7 , wherein the second pull down transistor comprises a third gate stack having a polarization layer, and wherein the second access transistor comprises a fourth gate stack having a polarization layer.

11. The SRAM memory cell of claim 7 , wherein the polarization layer of the first gate stack is between and in contact with a first gate oxide and a channel of the first pull down transistor, and wherein the polarization layer of the second gate stack is between and in contact with a second gate oxide and a channel of the first access transistor.

12. The SRAM memory cell of claim 7 , wherein the polarization layer of the first gate stack and the polarization layer of the second gate stack comprise hafnium and oxygen.

13. A system, comprising:

a processor; and

a memory array coupled to the processor, the memory array comprising an SRAM memory cell, and the SRAM memory cell comprising:

a first invertor having a first pull up transistor and a first pull down transistor, wherein the first pull down transistor comprises a first gate stack having a ferroelectric material between a gate oxide and a channel of the first pull down transistor, the ferroelectric material in contact with the gate oxide;

a first access transistor coupled to the first invertor, wherein the first access transistor comprises a second gate stack having a ferroelectric material;

a second invertor having a second pull up transistor and a second pull down transistor; and

a second access transistor coupled to the second invertor.

14. The system of claim 13 , further comprising:

a memory controller; and

a memory, wherein the memory controller is configured to couple the processor to the memory.

15. The system of claim 13 , further comprising:

a peripheral device coupled to the processor.

16. The system of claim 15 , wherein the peripheral device is a user interface selected from the group consisting of a keypad, a keyboard, a touch pad, a mouse, a display, and a touch sensitive display.

17. The system of claim 15 , wherein the peripheral device is a sensor selected from the group consisting of an accelerometer, a global positioning system, and a gyroscope.

18. The system of claim 15 , wherein the peripheral device is a storage device selected from the group consisting of a hard disk drive and a solid state drive.

19. The system of claim 13 , wherein the memory array and the processor are on a same die.

20. The system of claim 13 , wherein the system is selected from the group consisting of a mobile telephone, a smart phone, a wearable device, an Internet of Things networked device, a sensor system, and a computing system.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 15, 2022
From: INTEL CORPORATION
To: TAHOE RESEARCH, LTD.
Reel/Frame 061175/0176 →
Continuity (2)
Continuation 16078582
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