Image sensors and methods of forming the same
An image sensor includes a substrate including a light-receiving region and a light-shielding region, a device isolation pattern in the substrate of the light-receiving region to define active pixels, and a device isolation region in the substrate of the light-shielding region to define reference pixels. An isolation technique of the device isolation pattern is different from that of the device isolation region.
1. An image sensor comprising:
a substrate including a first surface and a second surface;
a plurality of photoelectric conversion parts disposed between the first surface of the substrate and the second surface of the substrate;
a plurality of interconnection structures disposed on the first surface of the substrate;
a light shielding pattern disposed on the second surface of the substrate;
a first device isolation pattern disposed in the substrate and disposed below the light shielding pattern; and
a second device isolation pattern disposed in the substrate,
wherein the second device isolation pattern is not disposed below the light shielding pattern, and
a depth of the first device isolation pattern is less than a depth of the second device isolation pattern.
2. The image sensor of claim 1 , wherein the plurality of photoelectric conversion parts include a first photoelectric conversion part, a second photoelectric conversion part, a third photoelectric conversion part and a fourth photoelectric conversion part,
the first photoelectric conversion part and the second photoelectric conversion part are disposed below the light shielding pattern,
the third photoelectric conversion part and the fourth photoelectric conversion part are not disposed below the light shielding pattern,
the first device isolation pattern is disposed between the first photoelectric conversion part and the second photoelectric conversion part, and
the second device isolation pattern is disposed between the third photoelectric conversion part and the fourth photoelectric conversion part.
3. The image sensor of claim 1 , wherein at least one of the first device isolation pattern and the second device isolation pattern has a depth of 0.3 μm to 6 μm.
4. The image sensor of claim 1 , wherein a width of a top surface of the first device isolation pattern is greater than a width of a bottom surface of the first device isolation pattern.
5. The image sensor of claim 1 , wherein the first device isolation pattern is in a light shielding region of the substrate, and
the second device isolation pattern is in a light receiving region of the substrate.
6. The image sensor of claim 5 , wherein the light shielding pattern covers the light shielding region of the substrate, but does not cover the light receiving region of the substrate.
7. The image sensor of claim 1 , further comprising an anti-reflection layer disposed on the second surface of the substrate and covering the first device isolation pattern and the second device isolation pattern.
8. The image sensor of claim 7 , further comprising:
a plurality of color filters disposed on the anti-reflection layer; and
a grid pattern disposed between two adjacent color filters among the plurality of color filters.
9. An image sensor comprising:
a substrate including a first surface and a second surface, and including a light shielding region and a light receiving region;
a plurality of photoelectric conversion parts disposed between the first surface of the substrate and the second surface of the substrate;
a plurality of interconnection structures disposed on the first surface of the substrate;
a light shielding pattern disposed on the second surface of the substrate and disposed on the light shielding region of the substrate;
a first device isolation pattern disposed in the light shielding region of the substrate and disposed below the light shielding pattern; and
a second device isolation pattern disposed in the light receiving region of the substrate,
wherein the second device isolation pattern is not disposed below the light shielding pattern,
a depth of the first device isolation pattern is less than a depth of the second device isolation pattern, and
the first device isolation pattern is spaced apart from the first surface of the substrate.
10. The image sensor of claim 9 , wherein the second device isolation pattern penetrates the substrate.
11. The image sensor of claim 9 , further comprising:
a color filter disposed on the light receiving region of the substrate; and
a micro-lens disposed on the color filter.
12. The image sensor of claim 9 , wherein a width of the second device isolation pattern is less than a width of the first device isolation pattern.
13. The image sensor of claim 9 , further comprising a transfer gate disposed on the first surface of the substrate.
14. The image sensor of claim 9 , wherein each of the first device isolation pattern and the second device isolation pattern has a depth of 0.3 μm to 6 μm.
15. An image sensor comprising:
a substrate including a first surface and a second surface, and including a light shielding region and a light receiving region;
a plurality of photoelectric conversion parts disposed between the first surface of the substrate and the second surface of the substrate;
a plurality of interconnection structures disposed on the first surface of the substrate;
a light shielding pattern disposed on the second surface of the substrate and disposed on the light shielding region of the substrate;
a first device isolation pattern disposed in the light shielding region of the substrate and disposed below the light shielding pattern;
a second device isolation pattern disposed in the light receiving region of the substrate;
a plurality of color filters disposed on the light receiving region of the substrate; and
a grid pattern disposed between two adjacent color filters among the plurality of color filters,
wherein a depth of the first device isolation pattern is less than a depth of the second device isolation pattern.
16. The image sensor of claim 15 , wherein the second device isolation pattern is not disposed below the light shielding pattern.
17. The image sensor of claim 15 , wherein the first device isolation pattern defines reference pixels, and
the second device isolation pattern defines active pixels.
18. The image sensor of claim 15 , wherein each of the first and second device isolation patterns includes a different material from the substrate.
19. The image sensor of claim 15 , wherein the first device isolation pattern is spaced apart from the first surface of the substrate, and
the second device isolation pattern contacts the first surface of the substrate.
20. The image sensor of claim 15 , further comprising a transfer gate disposed on the first surface of the substrate.