Plasma processing apparatus and plasma processing method
A plasma processing apparatus includes: a processing chamber in which a sample is subjected to plasma treatment; a radio frequency power supply configured to supply radio frequency power that generates plasma; a sample stage on which the sample is placed; and an ultraviolet light source configured to apply an ultraviolet ray. The apparatus further includes a controller configured to control the ultraviolet light source such that before the radio frequency power is supplied into the processing chamber, a pulse-modulated ultraviolet ray is applied into the processing chamber.
1. A plasma processing apparatus comprising:
a processing chamber in which a sample is subjected to plasma processing;
a radio frequency power supply supplying radio frequency power that generates plasma;
a sample stage on which the sample is placed;
an ultraviolet light source applying an ultraviolet ray; and
a controller configured to control the ultraviolet light source such that before the radio frequency power is supplied into the processing chamber, a pulse-modulated ultraviolet ray is applied into the processing chamber,
wherein the sample stage includes an electrode to which a direct current voltage is applied, the sample being electrostatically chucked by the direct current voltage, and
wherein the controller is configured to control the ultraviolet light source each that before the direct current voltage is applied to the electrode, the pulse-modulated ultraviolet ray is applied into the process chamber.
2. The plasma processing apparatus according to claim 1 ,
wherein the ultraviolet light source is disposed such that the pulse-modulated ultraviolet ray is applied to the sample.
3. The plasma processing apparatus according to claim 2 ,
wherein the ultraviolet light source is disposed such that the pulse-modulated ultraviolet ray is applied to a negatively charged region of a sample electrostatically chucked to the sample stage.
4. A plasma processing apparatus comprising:
a processing chamber in which a sample is subjected to plasma processing;
a radio frequency power supply supplying radio frequency power that generates plasma;
a sample stage on which the sample is placed;
an ultraviolet light source applying an ultraviolet ray; and
a controller configured to control the radio frequency power supply and the ultraviolet light source such that the radio frequency power is supplied into the processing chamber and a pulse-modulated ultraviolet ray is applied into the processing chamber,
wherein the sample stage includes an electrode to which a direct current voltage is applied, the sample being electrostatically chucked by the direct current voltage, and
wherein the controller is configured to control the ultraviolet light source each that before the direct current voltage is applied to the electrode, the pulse-modulated ultraviolet ray is applied into the process chamber.
5. The plasma processing apparatus according to claim 4 ,
wherein the ultraviolet light source is disposed such that the pulse-modulated ultraviolet ray is applied to the sample.
6. A plasma processing method of processing a sample in a processing chamber using plasma generated by radio frequency power, the method comprising:
before radio frequency power is supplied into the processing chamber, applying a pulse-modulated ultraviolet ray into the processing chamber; and
after the pulse-modulated ultraviolet ray is applied into the processing chamber, applying a direct current voltage to an electrode of a sample stage to electrostatically chuck said sample using the direct current voltage.